Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope

Gerald E. Jellison; John D. Hunn; Christopher M. Rouleau

doi:10.1364/AO.45.005479

Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope

Gerald E. Jellison
, John D. Hunn
, Christopher M. Rouleau

Research output: Contribution to journal › Article › peer-review

29 Scopus citations

Abstract

A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4 μm. The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001-0.002 for small values. Examples are given for aluminum, rutile (TiO₂), and calcite (CaCO₃).

Original language	English
Pages (from-to)	5479-5488
Number of pages	10
Journal	Applied Optics
Volume	45
Issue number	22
DOIs	https://doi.org/10.1364/AO.45.005479
State	Published - Aug 1 2006

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title = "Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope",

abstract = "A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4 μm. The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001-0.002 for small values. Examples are given for aluminum, rutile (TiO2), and calcite (CaCO3).",

author = "Jellison, \{Gerald E.\} and Hunn, \{John D.\} and Rouleau, \{Christopher M.\}",

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AU - Hunn, John D.

AU - Rouleau, Christopher M.

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Y1 - 2006/8/1

N2 - A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4 μm. The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001-0.002 for small values. Examples are given for aluminum, rutile (TiO2), and calcite (CaCO3).

AB - A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4 μm. The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001-0.002 for small values. Examples are given for aluminum, rutile (TiO2), and calcite (CaCO3).

UR - https://www.scopus.com/pages/publications/33749829593

U2 - 10.1364/AO.45.005479

DO - 10.1364/AO.45.005479

M3 - Article

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VL - 45

SP - 5479

EP - 5488

JO - Applied Optics

JF - Applied Optics

IS - 22

ER -

Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope

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