TY - JOUR
T1 - Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope
AU - Jellison, Gerald E.
AU - Hunn, John D.
AU - Rouleau, Christopher M.
PY - 2006/8/1
Y1 - 2006/8/1
N2 - A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4 μm. The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001-0.002 for small values. Examples are given for aluminum, rutile (TiO2), and calcite (CaCO3).
AB - A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4 μm. The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001-0.002 for small values. Examples are given for aluminum, rutile (TiO2), and calcite (CaCO3).
UR - http://www.scopus.com/inward/record.url?scp=33749829593&partnerID=8YFLogxK
U2 - 10.1364/AO.45.005479
DO - 10.1364/AO.45.005479
M3 - Article
AN - SCOPUS:33749829593
SN - 1559-128X
VL - 45
SP - 5479
EP - 5488
JO - Applied Optics
JF - Applied Optics
IS - 22
ER -