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Non-contact technique for the measurement of linear displacement using chirped diffraction gratings

  • W. B. Spillman
  • , P. L. Fuhr

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

A technique has been developed whereby linear displacement can be measured in a non-contact fashion. The method depends upon the properties of diffraction gratings with linear variation of period along their length. The grating is attached to a structure at a point of interest and interrogated via a collimated laser beam. A theoretical analysis of the technique is given and compared with experimental results.

Original languageEnglish
Pages (from-to)591-601
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1332
Issue numberpt 2
StatePublished - 1990
Externally publishedYes
EventOptical Testing and Metrology III: Recent Advances in Industrial Optical Inspection - San Diego, CA, USA
Duration: Jul 8 1990Jul 13 1990

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