Abstract
A technique has been developed whereby linear displacement can be measured in a non-contact fashion. The method depends upon the properties of diffraction gratings with linear variation of period along their length. The grating is attached to a structure at a point of interest and interrogated via a collimated laser beam. A theoretical analysis of the technique is given and compared with experimental results.
Original language | English |
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Pages (from-to) | 591-601 |
Number of pages | 11 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 1332 |
Issue number | pt 2 |
State | Published - 1990 |
Externally published | Yes |
Event | Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection - San Diego, CA, USA Duration: Jul 8 1990 → Jul 13 1990 |