@inproceedings{d3bf4c204b5644cdb41f7e4a5a79654c,
title = "New strategies for improvement and implementation of the digital electrostatic e-beam array lithography (DEAL) concept",
author = "Randolph, {S. J.} and Baylor, {L. R.} and Klein, {K. L.} and Gardner, {W. L.} and Kasica, {R. J.} and Guillorn, {M. A.} and Hensley, {D. K.} and Meyer, {H. M.} and S. Islam and Rack, {P. D.} and R. Rucker and T. Rahman and T. Grundman and T. Bigelow and Eliza, {S. A.} and R. Vijayar and Moore, {J. A.} and Simpson, {M. L.} and Ericson, {M. N.}",
year = "2006",
doi = "10.1109/IVNC.2006.335410",
language = "English",
isbn = "1424404010",
series = "IVNC and IFES 2006 - Technical Digest - l9th International Vacuum Nanoelectronics Conference and 50th International Field Emission Symposium",
pages = "165",
booktitle = "IVNC and IFES 2006 - Technical Digest - l9th International Vacuum Nanoelectronics Conference and 50th International Field Emission Symposium",
note = "19th International Vacuum Nanoelecronics Conference and 50th International Field Emission Symposium, IVNC and IFES 2006 ; Conference date: 17-07-2006 Through 20-07-2006",
}