Nanotribology and surface chemistry of reactively sputtered Ti-B-N hard coatings

The nanotribological performance of Ti-B-N protective coatings, 500 nm thick, have been studied in the range of 0-38.5 at.% N. A correlation was established amongst the chemical state, structure, mechanical properties, and nanowear resistance as a function of atomic percent nitrogen. The mechanical properties, elastic modulus and hardness, of the films were tested using a Hysitron Triboscope nanomechanical test instrument. The nanotribological performance of the films was evaluated using a Nanoindenter II with scratch capability. Single and reciprocating nanowear scratches, 10 μm in length, were performed at normal loads ranging from 50 to 750 μN. An atomic force microscope (AFM) was utilized to characterize the nanowear tracks with respect to depth and amount of plowing of material. The AFM images revealed that the reciprocating nanowear test caused grooving of the films with little to no material removal. Chemical and structural information was obtained by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction. Increasing N content correlated with increasing number of B-N bonds, structural disorder, and decreasing hardness, modulus, and wear resistance.