Nanostructured silicon membranes for control of molecular transport

Material Science

• Pore Size 100%
• Silicon 100%
• Surface (Surface Science) 100%
• Focused Ion Beam 50%
• Silicon Dioxide 50%
• Plasma-Enhanced Chemical Vapor Deposition 50%
• Reactive Ion Etching 50%
• Lithography 50%
• Fluorescence Microscopy 50%

Engineering

• Electron Optical Lithography 100%
• Engineering 50%
• Focused Ion Beam 50%
• Deep Reactive Ion Etching 50%
• Membrane Surface 50%
• Nanoscale 50%
• Chemical Vapor Deposition 50%
• Vapor Deposition 50%
• Atomic Layer Deposition 50%
• Physical Structure 50%
• Silicon Dioxide 50%

Chemical Engineering

• Plasma Enhanced Chemical Vapor Deposition 100%
• Atomic Layer Deposition 100%
• Lithography 100%
• Cryogenics 100%
• Silicon Dioxide 100%