Nanopipe fabrication using vertically aligned carbon nanofiber templates

A. V. Melechko; T. E. McKnight; M. A. Guillorn; D. W. Austin; B. Ilic; V. I. Merkulov; M. J. Doktycz; D. H. Lowndes; M. L. Simpson

doi:10.1116/1.1515306

Nanopipe fabrication using vertically aligned carbon nanofiber templates

A. V. Melechko, T. E. McKnight, M. A. Guillorn, D. W. Austin, B. Ilic, V. I. Merkulov, M. J. Doktycz, D. H. Lowndes, M. L. Simpson

Biosciences Division

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

A method of nanofabrication based on the synthesis of sacrificial self- assembled nanostructures (VACNFs) as templates for nanopipes is demonstrated. The carbon nanofibers are grown from catalytically defined points on a substrate, conformally coated with structural material such as SiO₂, and etched away in oxygen plasma after access holes are opened. The use of nanopipes as secondary templates for making metal nanowires by electrodeposition is also demonstrated.

Original language	English
Pages (from-to)	2730-2733
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	20
Issue number	6
DOIs	https://doi.org/10.1116/1.1515306
State	Published - Nov 2002

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title = "Nanopipe fabrication using vertically aligned carbon nanofiber templates",

abstract = "A method of nanofabrication based on the synthesis of sacrificial self- assembled nanostructures (VACNFs) as templates for nanopipes is demonstrated. The carbon nanofibers are grown from catalytically defined points on a substrate, conformally coated with structural material such as SiO2, and etched away in oxygen plasma after access holes are opened. The use of nanopipes as secondary templates for making metal nanowires by electrodeposition is also demonstrated.",

author = "Melechko, {A. V.} and McKnight, {T. E.} and Guillorn, {M. A.} and Austin, {D. W.} and B. Ilic and Merkulov, {V. I.} and Doktycz, {M. J.} and Lowndes, {D. H.} and Simpson, {M. L.}",

year = "2002",

month = nov,

doi = "10.1116/1.1515306",

language = "English",

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TY - JOUR

T1 - Nanopipe fabrication using vertically aligned carbon nanofiber templates

AU - Melechko, A. V.

AU - McKnight, T. E.

AU - Guillorn, M. A.

AU - Austin, D. W.

AU - Ilic, B.

AU - Merkulov, V. I.

AU - Doktycz, M. J.

AU - Lowndes, D. H.

AU - Simpson, M. L.

PY - 2002/11

Y1 - 2002/11

N2 - A method of nanofabrication based on the synthesis of sacrificial self- assembled nanostructures (VACNFs) as templates for nanopipes is demonstrated. The carbon nanofibers are grown from catalytically defined points on a substrate, conformally coated with structural material such as SiO2, and etched away in oxygen plasma after access holes are opened. The use of nanopipes as secondary templates for making metal nanowires by electrodeposition is also demonstrated.

AB - A method of nanofabrication based on the synthesis of sacrificial self- assembled nanostructures (VACNFs) as templates for nanopipes is demonstrated. The carbon nanofibers are grown from catalytically defined points on a substrate, conformally coated with structural material such as SiO2, and etched away in oxygen plasma after access holes are opened. The use of nanopipes as secondary templates for making metal nanowires by electrodeposition is also demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=0036883151&partnerID=8YFLogxK

U2 - 10.1116/1.1515306

DO - 10.1116/1.1515306

M3 - Article

AN - SCOPUS:0036883151

SN - 0734-211X

VL - 20

SP - 2730

EP - 2733

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Nanopipe fabrication using vertically aligned carbon nanofiber templates

Abstract

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