Nanometer-scale imaging and ablation with extreme ultraviolet lasers

C. S. Menoni; F. Brizuela; C. Brewer; H. Bravo; B. Langdon; M. Berrill; D. Martz; G. Vaschenko; M. C. Marconi; J. J. Rocca; W. Chao; E. H. Anderson; D. T. Attwood; A. V. Vinogradov; I. A. Artioukov; Y. P. Pershyn; V. V. Kondratenko; O. Hemberg; B. Frazer; S. Bloom

Nanometer-scale imaging and ablation with extreme ultraviolet lasers

C. S. Menoni, F. Brizuela, C. Brewer, H. Bravo, B. Langdon, M. Berrill, D. Martz, G. Vaschenko, M. C. Marconi, J. J. Rocca, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, V. V. Kondratenko, O. Hemberg, B. Frazer, S. Bloom

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics, CLEO 2007
Publisher	Optical Society of America
ISBN (Print)	1557528349, 9781557528346
State	Published - 2007
Externally published	Yes
Event	Conference on Lasers and Electro-Optics, CLEO 2007 - Baltimore, MD, United States Duration: May 6 2007 → May 6 2007

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Conference on Lasers and Electro-Optics, CLEO 2007
Country/Territory	United States
City	Baltimore, MD
Period	05/6/07 → 05/6/07

Cite this

Menoni, C. S., Brizuela, F., Brewer, C., Bravo, H., Langdon, B., Berrill, M., Martz, D., Vaschenko, G., Marconi, M. C., Rocca, J. J., Chao, W., Anderson, E. H., Attwood, D. T., Vinogradov, A. V., Artioukov, I. A., Pershyn, Y. P., Kondratenko, V. V., Hemberg, O., Frazer, B., & Bloom, S. (2007). Nanometer-scale imaging and ablation with extreme ultraviolet lasers. In Conference on Lasers and Electro-Optics, CLEO 2007 (Optics InfoBase Conference Papers). Optical Society of America.

@inproceedings{6fca09835a29402286e3230f15ff7561,

title = "Nanometer-scale imaging and ablation with extreme ultraviolet lasers",

abstract = "The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.",

author = "Menoni, {C. S.} and F. Brizuela and C. Brewer and H. Bravo and B. Langdon and M. Berrill and D. Martz and G. Vaschenko and Marconi, {M. C.} and Rocca, {J. J.} and W. Chao and Anderson, {E. H.} and Attwood, {D. T.} and Vinogradov, {A. V.} and Artioukov, {I. A.} and Pershyn, {Y. P.} and Kondratenko, {V. V.} and O. Hemberg and B. Frazer and S. Bloom",

year = "2007",

language = "English",

isbn = "1557528349",

series = "Optics InfoBase Conference Papers",

publisher = "Optical Society of America",

booktitle = "Conference on Lasers and Electro-Optics, CLEO 2007",

note = "Conference on Lasers and Electro-Optics, CLEO 2007 ; Conference date: 06-05-2007 Through 06-05-2007",

}

Menoni, CS, Brizuela, F, Brewer, C, Bravo, H, Langdon, B, Berrill, M, Martz, D, Vaschenko, G, Marconi, MC, Rocca, JJ, Chao, W, Anderson, EH, Attwood, DT, Vinogradov, AV, Artioukov, IA, Pershyn, YP, Kondratenko, VV, Hemberg, O, Frazer, B & Bloom, S 2007, Nanometer-scale imaging and ablation with extreme ultraviolet lasers. in Conference on Lasers and Electro-Optics, CLEO 2007. Optics InfoBase Conference Papers, Optical Society of America, Conference on Lasers and Electro-Optics, CLEO 2007, Baltimore, MD, United States, 05/6/07.

TY - GEN

T1 - Nanometer-scale imaging and ablation with extreme ultraviolet lasers

AU - Menoni, C. S.

AU - Brizuela, F.

AU - Brewer, C.

AU - Bravo, H.

AU - Langdon, B.

AU - Berrill, M.

AU - Martz, D.

AU - Vaschenko, G.

AU - Marconi, M. C.

AU - Rocca, J. J.

AU - Chao, W.

AU - Anderson, E. H.

AU - Attwood, D. T.

AU - Vinogradov, A. V.

AU - Artioukov, I. A.

AU - Pershyn, Y. P.

AU - Kondratenko, V. V.

AU - Hemberg, O.

AU - Frazer, B.

AU - Bloom, S.

PY - 2007

Y1 - 2007

N2 - The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.

AB - The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.

UR - http://www.scopus.com/inward/record.url?scp=84898995114&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84898995114

SN - 1557528349

SN - 9781557528346

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics, CLEO 2007

PB - Optical Society of America

T2 - Conference on Lasers and Electro-Optics, CLEO 2007

Y2 - 6 May 2007 through 6 May 2007

ER -

Nanometer-scale imaging and ablation with extreme ultraviolet lasers

Abstract

Publication series

Conference

Other files and links

Fingerprint

Cite this