Nanometer-scale imaging and ablation with extreme ultraviolet lasers

C. S. Menoni; F. Brizuela; C. Brewer; H. Bravo; B. Langdon; M. Berrill; D. Martz; G. Vaschenko; M. C. Marconi; J. J. Rocca; W. Chao; E. H. Anderson; D. T. Attwood; A. V. Vinogradov; I. A. Artioukov; Y. P. Pershyn; V. V. Kondratenko; O. Hemberg; B. Frazer; S. Bloom

doi:10.1109/CLEO.2007.4452703

Nanometer-scale imaging and ablation with extreme ultraviolet lasers

C. S. Menoni, F. Brizuela, C. Brewer, H. Bravo, B. Langdon, M. Berrill, D. Martz, G. Vaschenko, M. C. Marconi, J. J. Rocca, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, V. V. Kondratenko, O. Hemberg, B. Frazer, S. Bloom

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics, 2007, CLEO 2007
DOIs	https://doi.org/10.1109/CLEO.2007.4452703
State	Published - 2007
Externally published	Yes
Event	Conference on Lasers and Electro-Optics, 2007, CLEO 2007 - Baltimore, MD, United States Duration: May 6 2007 → May 11 2007

Publication series

Name	Conference on Lasers and Electro-Optics, 2007, CLEO 2007

Conference

Conference	Conference on Lasers and Electro-Optics, 2007, CLEO 2007
Country/Territory	United States
City	Baltimore, MD
Period	05/6/07 → 05/11/07

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10.1109/CLEO.2007.4452703

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Menoni, C. S., Brizuela, F., Brewer, C., Bravo, H., Langdon, B., Berrill, M., Martz, D., Vaschenko, G., Marconi, M. C., Rocca, J. J., Chao, W., Anderson, E. H., Attwood, D. T., Vinogradov, A. V., Artioukov, I. A., Pershyn, Y. P., Kondratenko, V. V., Hemberg, O., Frazer, B., & Bloom, S. (2007). Nanometer-scale imaging and ablation with extreme ultraviolet lasers. In Conference on Lasers and Electro-Optics, 2007, CLEO 2007 Article 4452703 (Conference on Lasers and Electro-Optics, 2007, CLEO 2007). https://doi.org/10.1109/CLEO.2007.4452703

@inproceedings{9f20fb9c000d45c9bee1aeb9ff4b525f,

title = "Nanometer-scale imaging and ablation with extreme ultraviolet lasers",

abstract = "The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.",

author = "Menoni, {C. S.} and F. Brizuela and C. Brewer and H. Bravo and B. Langdon and M. Berrill and D. Martz and G. Vaschenko and Marconi, {M. C.} and Rocca, {J. J.} and W. Chao and Anderson, {E. H.} and Attwood, {D. T.} and Vinogradov, {A. V.} and Artioukov, {I. A.} and Pershyn, {Y. P.} and Kondratenko, {V. V.} and O. Hemberg and B. Frazer and S. Bloom",

year = "2007",

doi = "10.1109/CLEO.2007.4452703",

language = "English",

isbn = "9781557528346",

series = "Conference on Lasers and Electro-Optics, 2007, CLEO 2007",

booktitle = "Conference on Lasers and Electro-Optics, 2007, CLEO 2007",

note = "Conference on Lasers and Electro-Optics, 2007, CLEO 2007 ; Conference date: 06-05-2007 Through 11-05-2007",

}

Menoni, CS, Brizuela, F, Brewer, C, Bravo, H, Langdon, B, Berrill, M, Martz, D, Vaschenko, G, Marconi, MC, Rocca, JJ, Chao, W, Anderson, EH, Attwood, DT, Vinogradov, AV, Artioukov, IA, Pershyn, YP, Kondratenko, VV, Hemberg, O, Frazer, B & Bloom, S 2007, Nanometer-scale imaging and ablation with extreme ultraviolet lasers. in Conference on Lasers and Electro-Optics, 2007, CLEO 2007., 4452703, Conference on Lasers and Electro-Optics, 2007, CLEO 2007, Conference on Lasers and Electro-Optics, 2007, CLEO 2007, Baltimore, MD, United States, 05/6/07. https://doi.org/10.1109/CLEO.2007.4452703

TY - GEN

T1 - Nanometer-scale imaging and ablation with extreme ultraviolet lasers

AU - Menoni, C. S.

AU - Brizuela, F.

AU - Brewer, C.

AU - Bravo, H.

AU - Langdon, B.

AU - Berrill, M.

AU - Martz, D.

AU - Vaschenko, G.

AU - Marconi, M. C.

AU - Rocca, J. J.

AU - Chao, W.

AU - Anderson, E. H.

AU - Attwood, D. T.

AU - Vinogradov, A. V.

AU - Artioukov, I. A.

AU - Pershyn, Y. P.

AU - Kondratenko, V. V.

AU - Hemberg, O.

AU - Frazer, B.

AU - Bloom, S.

PY - 2007

Y1 - 2007

N2 - The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.

AB - The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.

UR - http://www.scopus.com/inward/record.url?scp=82955207690&partnerID=8YFLogxK

U2 - 10.1109/CLEO.2007.4452703

DO - 10.1109/CLEO.2007.4452703

M3 - Conference contribution

AN - SCOPUS:82955207690

SN - 9781557528346

T3 - Conference on Lasers and Electro-Optics, 2007, CLEO 2007

BT - Conference on Lasers and Electro-Optics, 2007, CLEO 2007

T2 - Conference on Lasers and Electro-Optics, 2007, CLEO 2007

Y2 - 6 May 2007 through 11 May 2007

ER -

Nanometer-scale imaging and ablation with extreme ultraviolet lasers

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