Abstract
The drive towards ubiquitous electronics requires fundamental shifts in our approach to microelectronic fabrication as well as advances in materials and processing technologies. For large area electronics, low cost manufacturing, including roll-to-roll and printing technologies, will be required. These techniques present continuing challenges to develop processing technologies compatible with the low thermal budgets required for flexible polymeric substrates. The authors report here the deposition and dielectric properties of nanocrystalline BaTi O3 films on polyethylene terephthalate utilizing laser annealing as part of their effort to develop methods and tools for depositing various functional coatings and films on flexible substrates.
| Original language | English |
|---|---|
| Article number | 202910 |
| Journal | Applied Physics Letters |
| Volume | 89 |
| Issue number | 20 |
| DOIs | |
| State | Published - 2006 |
| Externally published | Yes |
Funding
The authors gratefully acknowledge Kodak for funding and for providing PET substrates. They also acknowledge G. Malliaras for use of experimental facilities and B. van Dover and C. Umbach for useful discussions. They also thank A. Bourlinos for suggestions with M. Weathers for assistance with XRD, J. Shu for assistance in XPS, and M. Bergkvist and J. Mabeck for fruitful discussions. This work benefited from the Cornell Center of Materials Research (CCMR) shared facilities.