Nano-scale ablation with soft x-ray lasers

Fernando Brizuela; Herman Bravo; Georgiy Vaschenko; Mark Berrill; Benjamin Langdon; Carmen S. Menoni; Oscar Hemberg; Scott Bloom; Weilun Chao; Erik H. Anderson; David T. Attwood; Jorge J. Rocca

doi:10.1117/12.733401

Nano-scale ablation with soft x-ray lasers

Fernando Brizuela
, Herman Bravo
, Georgiy Vaschenko
, Mark Berrill
, Benjamin Langdon
, Carmen S. Menoni
, Oscar Hemberg
, Scott Bloom
, Weilun Chao
, Erik H. Anderson
, David T. Attwood
, Jorge J. Rocca

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge son x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

Original language	English
Title of host publication	Soft X-Ray Lasers and Applications VII
DOIs	https://doi.org/10.1117/12.733401
State	Published - 2007
Externally published	Yes
Event	Soft X-Ray Lasers and Applications VII - San Diego, CA, United States Duration: Aug 29 2007 → Aug 30 2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6702
ISSN (Print)	0277-786X

Conference

Conference	Soft X-Ray Lasers and Applications VII
Country/Territory	United States
City	San Diego, CA
Period	08/29/07 → 08/30/07

Keywords

Ablation
Soft x-ray laser
Spectroscopy

Access to Document

10.1117/12.733401

Cite this

Brizuela, F., Bravo, H., Vaschenko, G., Berrill, M., Langdon, B., Menoni, C. S., Hemberg, O., Bloom, S., Chao, W., Anderson, E. H., Attwood, D. T., & Rocca, J. J. (2007). Nano-scale ablation with soft x-ray lasers. In Soft X-Ray Lasers and Applications VII Article 67020L (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6702). https://doi.org/10.1117/12.733401

@inproceedings{732ec244c3ef4be69414cb8aa48867da,

title = "Nano-scale ablation with soft x-ray lasers",

abstract = "We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge son x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.",

keywords = "Ablation, Soft x-ray laser, Spectroscopy",

author = "Fernando Brizuela and Herman Bravo and Georgiy Vaschenko and Mark Berrill and Benjamin Langdon and Menoni, \{Carmen S.\} and Oscar Hemberg and Scott Bloom and Weilun Chao and Anderson, \{Erik H.\} and Attwood, \{David T.\} and Rocca, \{Jorge J.\}",

year = "2007",

doi = "10.1117/12.733401",

language = "English",

isbn = "9780819468505",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Soft X-Ray Lasers and Applications VII",

note = "Soft X-Ray Lasers and Applications VII ; Conference date: 29-08-2007 Through 30-08-2007",

}

Brizuela, F, Bravo, H, Vaschenko, G, Berrill, M, Langdon, B, Menoni, CS, Hemberg, O, Bloom, S, Chao, W, Anderson, EH, Attwood, DT & Rocca, JJ 2007, Nano-scale ablation with soft x-ray lasers. in Soft X-Ray Lasers and Applications VII., 67020L, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6702, Soft X-Ray Lasers and Applications VII, San Diego, CA, United States, 08/29/07. https://doi.org/10.1117/12.733401

TY - GEN

T1 - Nano-scale ablation with soft x-ray lasers

AU - Brizuela, Fernando

AU - Bravo, Herman

AU - Vaschenko, Georgiy

AU - Berrill, Mark

AU - Langdon, Benjamin

AU - Menoni, Carmen S.

AU - Hemberg, Oscar

AU - Bloom, Scott

AU - Chao, Weilun

AU - Anderson, Erik H.

AU - Attwood, David T.

AU - Rocca, Jorge J.

PY - 2007

Y1 - 2007

N2 - We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge son x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

AB - We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge son x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

KW - Ablation

KW - Soft x-ray laser

KW - Spectroscopy

UR - https://www.scopus.com/pages/publications/42149133313

U2 - 10.1117/12.733401

DO - 10.1117/12.733401

M3 - Conference contribution

AN - SCOPUS:42149133313

SN - 9780819468505

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Soft X-Ray Lasers and Applications VII

T2 - Soft X-Ray Lasers and Applications VII

Y2 - 29 August 2007 through 30 August 2007

ER -

Nano-scale ablation with soft x-ray lasers

Abstract

Publication series

Conference

Keywords

Access to Document

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