Nano-scale ablation with soft x-ray lasers

Fernando Brizuela; Herman Bravo; Georgiy Vaschenko; Mark Berrill; Benjamin Langdon; Carmen S. Menoni; Oscar Hemberg; Scott Bloom; Weilun Chao; Erik H. Anderson; David T. Attwood; Jorge J. Rocca

doi:10.1117/12.733401

Nano-scale ablation with soft x-ray lasers

Fernando Brizuela, Herman Bravo, Georgiy Vaschenko, Mark Berrill, Benjamin Langdon, Carmen S. Menoni, Oscar Hemberg, Scott Bloom, Weilun Chao, Erik H. Anderson, David T. Attwood, Jorge J. Rocca

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge son x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

Original language	English
Title of host publication	Soft X-Ray Lasers and Applications VII
DOIs	https://doi.org/10.1117/12.733401
State	Published - 2007
Externally published	Yes
Event	Soft X-Ray Lasers and Applications VII - San Diego, CA, United States Duration: Aug 29 2007 → Aug 30 2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6702
ISSN (Print)	0277-786X

Conference

Conference	Soft X-Ray Lasers and Applications VII
Country/Territory	United States
City	San Diego, CA
Period	08/29/07 → 08/30/07

Keywords

Ablation
Soft x-ray laser
Spectroscopy

Access to Document

10.1117/12.733401

Cite this

Brizuela, F., Bravo, H., Vaschenko, G., Berrill, M., Langdon, B., Menoni, C. S., Hemberg, O., Bloom, S., Chao, W., Anderson, E. H., Attwood, D. T., & Rocca, J. J. (2007). Nano-scale ablation with soft x-ray lasers. In Soft X-Ray Lasers and Applications VII Article 67020L (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6702). https://doi.org/10.1117/12.733401

@inproceedings{732ec244c3ef4be69414cb8aa48867da,

title = "Nano-scale ablation with soft x-ray lasers",

abstract = "We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge son x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.",

keywords = "Ablation, Soft x-ray laser, Spectroscopy",

author = "Fernando Brizuela and Herman Bravo and Georgiy Vaschenko and Mark Berrill and Benjamin Langdon and Menoni, {Carmen S.} and Oscar Hemberg and Scott Bloom and Weilun Chao and Anderson, {Erik H.} and Attwood, {David T.} and Rocca, {Jorge J.}",

year = "2007",

doi = "10.1117/12.733401",

language = "English",

isbn = "9780819468505",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Soft X-Ray Lasers and Applications VII",

note = "Soft X-Ray Lasers and Applications VII ; Conference date: 29-08-2007 Through 30-08-2007",

}

Brizuela, F, Bravo, H, Vaschenko, G, Berrill, M, Langdon, B, Menoni, CS, Hemberg, O, Bloom, S, Chao, W, Anderson, EH, Attwood, DT & Rocca, JJ 2007, Nano-scale ablation with soft x-ray lasers. in Soft X-Ray Lasers and Applications VII., 67020L, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6702, Soft X-Ray Lasers and Applications VII, San Diego, CA, United States, 08/29/07. https://doi.org/10.1117/12.733401

TY - GEN

T1 - Nano-scale ablation with soft x-ray lasers

AU - Brizuela, Fernando

AU - Bravo, Herman

AU - Vaschenko, Georgiy

AU - Berrill, Mark

AU - Langdon, Benjamin

AU - Menoni, Carmen S.

AU - Hemberg, Oscar

AU - Bloom, Scott

AU - Chao, Weilun

AU - Anderson, Erik H.

AU - Attwood, David T.

AU - Rocca, Jorge J.

PY - 2007

Y1 - 2007

N2 - We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge son x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

AB - We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge son x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

KW - Ablation

KW - Soft x-ray laser

KW - Spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=42149133313&partnerID=8YFLogxK

U2 - 10.1117/12.733401

DO - 10.1117/12.733401

M3 - Conference contribution

AN - SCOPUS:42149133313

SN - 9780819468505

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Soft X-Ray Lasers and Applications VII

T2 - Soft X-Ray Lasers and Applications VII

Y2 - 29 August 2007 through 30 August 2007

ER -

Nano-scale ablation with soft x-ray lasers

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this