Nano-cluster engineering: A combined ion implantation/co-deposition and ionizing radiation

D. Ila, R. L. Zimmerman, C. I. Muntele, P. Thevenard, F. Orucevic, C. L. Santamaria, P. S. Guichard, S. Schiestel, C. A. Carosella, G. K. Hubler, D. B. Poker, D. K. Hensley

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

We have used the energy deposited due to the electronic excitation by post-implantation irradiation to induce the nucleation of nano-clusters of Au in silica. We have produced the Au/silica by two methods. (A) MeV Au implantation into silica, (B) producing thin films of a combined Au and silica on a silica substrate, using co-deposition of gold and silica. The process of ion beam assisted nucleation of nano-clusters was used to reduce the threshold implantation dose, or the Au concentration in the silica host, required to produce Au nano-crystals by at least two orders of magnitude. In this presentation, we applied a similar technique, post-irradiation electronic excitation, to films produced by both ion implantation of Au into silica as well as to films produced using co-deposition of gold and silica. By a co-deposition technique, gold and silica (co-deposited at various concentrations) are grown, then post-irradiated. The resultant Au nano-cluster formation was observed and studied using optical spectroscopy, X-ray diffraction, RBS and TEM.

Original languageEnglish
Pages (from-to)416-421
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume191
Issue number1-4
DOIs
StatePublished - May 2002

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