Multiple-input microcantilever sensors

C. L. Britton, R. L. Jones, P. I. Oden, Z. Hu, R. J. Warmack, S. F. Smith, W. L. Bryan, J. M. Rochelle

Research output: Contribution to journalConference articlepeer-review

108 Scopus citations

Abstract

A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Cantilever motion due to absorption- induced stress was readout using a custom-designed, eight-channel integrated circuit. Combined hydrogen and mercury vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting. (C) 2000 Elsevier Science B.V.

Original languageEnglish
Pages (from-to)17-21
Number of pages5
JournalUltramicroscopy
Volume82
Issue number1-4
DOIs
StatePublished - Feb 2000
EventThe International Conference on Scanning Probe Microscopy, Cantilever Sensors and Nanostructures (SPM '99) - Seattle, WA, USA
Duration: May 30 1999Jun 1 1999

Funding

We have benefited from the advice, encouragement, and efforts of many individuals, including Thomas Thundat, Gil Brown, Phil Britt, Jeff DePriest, Lloyd Clonts, Mike Emery, Mike Moore, Nance Ericson, Gary Turner, Alan Wintenberg, and T. D. Threatt. This research was sponsored by the U.S. Dept. of Energy and performed at Oak Ridge National Laboratory, managed by Lockheed Martin Energy Research, Inc. for the U.S. Dept. of Energy under Contract No. DE-AC05-96OR22464.

Keywords

  • Absorption-induced stress
  • Microcantilever
  • Multiple-input chemical sensing

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