Abstract
A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Cantilever motion due to absorption- induced stress was readout using a custom-designed, eight-channel integrated circuit. Combined hydrogen and mercury vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting. (C) 2000 Elsevier Science B.V.
Original language | English |
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Pages (from-to) | 17-21 |
Number of pages | 5 |
Journal | Ultramicroscopy |
Volume | 82 |
Issue number | 1-4 |
DOIs | |
State | Published - Feb 2000 |
Event | The International Conference on Scanning Probe Microscopy, Cantilever Sensors and Nanostructures (SPM '99) - Seattle, WA, USA Duration: May 30 1999 → Jun 1 1999 |
Funding
We have benefited from the advice, encouragement, and efforts of many individuals, including Thomas Thundat, Gil Brown, Phil Britt, Jeff DePriest, Lloyd Clonts, Mike Emery, Mike Moore, Nance Ericson, Gary Turner, Alan Wintenberg, and T. D. Threatt. This research was sponsored by the U.S. Dept. of Energy and performed at Oak Ridge National Laboratory, managed by Lockheed Martin Energy Research, Inc. for the U.S. Dept. of Energy under Contract No. DE-AC05-96OR22464.
Keywords
- Absorption-induced stress
- Microcantilever
- Multiple-input chemical sensing