Multi-modal, ultrasensitive, wide-range humidity sensing with Ti3C2 film

Eric S. Muckley, Michael Naguib, Ilia N. Ivanov

Research output: Contribution to journalArticlepeer-review

83 Scopus citations

Abstract

Gravimetric, direct-current electrical, and electrical impedance sensing modes were used to measure response of high surface area 2D Ti3C2 MXene film to water vapor pressures spanning 3 orders of magnitude (20 mTorr-20 Torr). The Ti3C2 film exhibited reproducible reversible response in 0.1%-95% relative humidity (RH) range with a detection limit of <20 mTorr H2O partial pressure (<0.1% RH). DC electrical current-based sensing with 3 mV operating voltage and 0.8 pW power consumption was demonstrated. The highest normalized sensitivity was shown for gravimetric sensing modalities which scale with the overtone number, reaching highest sensitivity of about 12 Hz/% RH at the 9th crystal overtone (45 MHz oscillation).

Original languageEnglish
Pages (from-to)21689-21695
Number of pages7
JournalNanoscale
Volume10
Issue number46
DOIs
StatePublished - Dec 14 2018

Funding

†This manuscript has been authored by UT-Battelle, LLC under Contract No. DE-AC05-00OR22725 with the U.S. Department of Energy. The United States Government retains and the publisher, by accepting the article for publication, acknowledges that the United States Government retains a non-exclusive, paid-up, irrevocable, world-wide license to publish or reproduce the published form of this manuscript, or allow others to do so, for United States Government purposes. The Department of Energy will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan (http://energy.gov/downloads/doe-public-access-plan). ‡Electronic supplementary information (ESI) available. See DOI: 10.1039/ c8nr05170d

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