Morphology and microstructure of (111) crystalline CeO2 films grown on amorphous SiO2 substrates by pulsed-laser ablation

S. Zhu, Douglas H. Lowndes, J. D. Budai, T. Thundat, D. P. Norton, R. J. Warmack

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

The surface morphology and microstructure of (111)-oriented CeO2 thin films, grown on amorphous fused silica (SiO2) substrates by low-energy-ion-beam assisted pulsed laser ablation, have been studied by atomic force microscopy (AFM) and x-ray diffraction (XRD). These CeO2 films are aligned with respect to a single in-plane axis despite being deposited on an amorphous substrate. There is a honeycomb-like growth morphology to the films and island-growth can be observed in thicker films. These islands, inside of which are high density of honeycomb-like clusters, are separated by a void network with approx.700nm width. However, on the surface of the thinnest film (approx.3nm), only very small clusters (diameter <60nm) appear, and the boundaries of the void network are undefined, which implies that the film is just beginning to coalesce into clusters (grains). The combined AFM images and XRD pattern suggest these clusters probably are the initial seeds for the subsequent island growth. Based on these results, the growth mechanism of oriented CeO2 films on amorphous fused silica substrates is discussed.

Original languageEnglish
Pages (from-to)603-608
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume354
StatePublished - 1995
Externally publishedYes
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 28 1994Nov 30 1994

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