Molecular beam epitaxial growth and characterization of Al(Ga)N nanowire deep ultraviolet light emitting diodes and lasers

Z. Mi, S. Zhao, S. Y. Woo, M. Bugnet, M. Djavid, X. Liu, J. Kang, X. Kong, W. Ji, H. Guo, Z. Liu, G. A. Botton

Research output: Contribution to journalArticlepeer-review

50 Scopus citations

Abstract

We report on the detailed molecular beam epitaxial growth and characterization of Al(Ga)N nanowire heterostructures on Si and their applications for deep ultraviolet light emitting diodes and lasers. The nanowires are formed under nitrogen-rich conditions without using any metal catalyst. Compared to conventional epilayers, Mg-dopant incorporation is significantly enhanced in nearly strain- and defect-free Al(Ga)N nanowire structures, leading to efficient p-type conduction. The resulting Al(Ga)N nanowire LEDs exhibit excellent performance, including a turn-on voltage of ∼5.5 V for an AlN nanowire LED operating at 207 nm. The design, fabrication, and performance of an electrically injected AlGaN nanowire laser operating in the UV-B band is also presented.

Original languageEnglish
Article number364006
JournalJournal of Physics D: Applied Physics
Volume49
Issue number36
DOIs
StatePublished - Aug 17 2016
Externally publishedYes

Funding

This work was supported by the Natural Sciences and Engineering Research Council of Canada (NSERC) and US Army Research Office under the grant W911NF-15-1-0168. XK thanks the Chinese Scholarship Council for the support. Part of the work was performed in the McGill Nanotools-Microfab facility. SEM studies were performed in the Facility for Electron Microscopy Research, McGill University. STEM investigations were performed in the Canadian Centre for Electron Microscopy, a national facility supported by NSERC, the Canada Foundation for Innovation under the MSI program, and McMaster University.

FundersFunder number
Army Research OfficeW911NF-15-1-0168
McMaster University
Natural Sciences and Engineering Research Council of Canada
Canada Foundation for Innovation
China Scholarship Council

    Keywords

    • AlN
    • GaN
    • LED
    • laser
    • nanowire
    • p-doping
    • quantum dot
    • ultraviolet

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