MOCVD of YSZ coatings using β-diketonate precursors

V. G. Varanasi; T. M. Besmann; R. L. Hyde; E. A. Payzant; T. J. Anderson

doi:10.1016/j.jallcom.2008.02.103

MOCVD of YSZ coatings using β-diketonate precursors

V. G. Varanasi, T. M. Besmann, R. L. Hyde, E. A. Payzant, T. J. Anderson

Materials Engineering

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Metallorganic chemical vapor deposition (MOCVD) was investigated as a more efficient means to fabricate yttria-stabilized zirconia (YSZ) for thermal barrier coating. The MOCVD precursors were Y(tmhd)₃ and Zr(tmhd)₄ (tmhd, 2,2,6,6-tetramethyl-3,5-heptanedianato) and delivered via aerosol-assisted liquid delivery (AALD). The maximum YSZ coating rate was 14.2 ± 1.3 μm h^-1 at 827 °C yielding a layered coating microstructure. The growth was first-order with temperature below 827 °C with an apparent activation energy of 50.9 ± 4.3 kJ mol^-1. Coating efficiency was a maximum of approximately 10% at the highest growth rate. While homogeneous nucleation remained a problem, the deposition of YSZ with only minor carbon content was achieved.

Original language	English
Pages (from-to)	354-359
Number of pages	6
Journal	Journal of Alloys and Compounds
Volume	470
Issue number	1-2
DOIs	https://doi.org/10.1016/j.jallcom.2008.02.103
State	Published - Feb 20 2009

Funding

The authors wish to thank Dr. John Vitek (Materials Science and Technology Division, Oak Ridge National Laboratory) for supporting the ThermoCalc software package and Dr. Hans Siefert (Department of Materials Science and Engineering, University of Florida) for his contribution of the computed Zr–O phase diagram. Valuable guidance was provided by Olga Kryliouk, J.C. Mclaughlin, Nagraj Kulkarni, Weidong Zhuang, Jianyun Shen, Suresh Babu and Ronald Ott. The research was sponsored by the Office of Fossil Energy, National Energy Technology Laboratory, U.S. Department of Energy, under contract number DE-AC05-00OR22725 with UT-Battelle, LLC. The XRD characterization was supported by the assistant secretary for Energy Efficiency and Renewable Energy, Office of FreedomCAR and Vehicle Technologies, as part of the High Temperature Materials Laboratory User Program, Oak Ridge National Laboratory.

Funders	Funder number
Office of FreedomCar
U.S. Department of Energy	DE-AC05-00OR22725
Office of Fossil Energy
Office of Energy Efficiency and Renewable Energy
Oak Ridge National Laboratory
National Energy Technology Laboratory

Keywords

Ceramics
Coating materials
Oxide materials
Thermodynamic modeling
Vapor deposition

Access to Document

10.1016/j.jallcom.2008.02.103

Cite this

@article{ccc08533a4304d9dac37d8b42f3e6a54,

title = "MOCVD of YSZ coatings using β-diketonate precursors",

abstract = "Metallorganic chemical vapor deposition (MOCVD) was investigated as a more efficient means to fabricate yttria-stabilized zirconia (YSZ) for thermal barrier coating. The MOCVD precursors were Y(tmhd)3 and Zr(tmhd)4 (tmhd, 2,2,6,6-tetramethyl-3,5-heptanedianato) and delivered via aerosol-assisted liquid delivery (AALD). The maximum YSZ coating rate was 14.2 ± 1.3 μm h-1 at 827 °C yielding a layered coating microstructure. The growth was first-order with temperature below 827 °C with an apparent activation energy of 50.9 ± 4.3 kJ mol-1. Coating efficiency was a maximum of approximately 10% at the highest growth rate. While homogeneous nucleation remained a problem, the deposition of YSZ with only minor carbon content was achieved.",

keywords = "Ceramics, Coating materials, Oxide materials, Thermodynamic modeling, Vapor deposition",

author = "Varanasi, {V. G.} and Besmann, {T. M.} and Hyde, {R. L.} and Payzant, {E. A.} and Anderson, {T. J.}",

year = "2009",

month = feb,

day = "20",

doi = "10.1016/j.jallcom.2008.02.103",

language = "English",

volume = "470",

pages = "354--359",

journal = "Journal of Alloys and Compounds",

issn = "0925-8388",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - MOCVD of YSZ coatings using β-diketonate precursors

AU - Varanasi, V. G.

AU - Besmann, T. M.

AU - Hyde, R. L.

AU - Payzant, E. A.

AU - Anderson, T. J.

PY - 2009/2/20

Y1 - 2009/2/20

N2 - Metallorganic chemical vapor deposition (MOCVD) was investigated as a more efficient means to fabricate yttria-stabilized zirconia (YSZ) for thermal barrier coating. The MOCVD precursors were Y(tmhd)3 and Zr(tmhd)4 (tmhd, 2,2,6,6-tetramethyl-3,5-heptanedianato) and delivered via aerosol-assisted liquid delivery (AALD). The maximum YSZ coating rate was 14.2 ± 1.3 μm h-1 at 827 °C yielding a layered coating microstructure. The growth was first-order with temperature below 827 °C with an apparent activation energy of 50.9 ± 4.3 kJ mol-1. Coating efficiency was a maximum of approximately 10% at the highest growth rate. While homogeneous nucleation remained a problem, the deposition of YSZ with only minor carbon content was achieved.

AB - Metallorganic chemical vapor deposition (MOCVD) was investigated as a more efficient means to fabricate yttria-stabilized zirconia (YSZ) for thermal barrier coating. The MOCVD precursors were Y(tmhd)3 and Zr(tmhd)4 (tmhd, 2,2,6,6-tetramethyl-3,5-heptanedianato) and delivered via aerosol-assisted liquid delivery (AALD). The maximum YSZ coating rate was 14.2 ± 1.3 μm h-1 at 827 °C yielding a layered coating microstructure. The growth was first-order with temperature below 827 °C with an apparent activation energy of 50.9 ± 4.3 kJ mol-1. Coating efficiency was a maximum of approximately 10% at the highest growth rate. While homogeneous nucleation remained a problem, the deposition of YSZ with only minor carbon content was achieved.

KW - Ceramics

KW - Coating materials

KW - Oxide materials

KW - Thermodynamic modeling

KW - Vapor deposition

UR - http://www.scopus.com/inward/record.url?scp=59249104299&partnerID=8YFLogxK

U2 - 10.1016/j.jallcom.2008.02.103

DO - 10.1016/j.jallcom.2008.02.103

M3 - Article

AN - SCOPUS:59249104299

SN - 0925-8388

VL - 470

SP - 354

EP - 359

JO - Journal of Alloys and Compounds

JF - Journal of Alloys and Compounds

IS - 1-2

ER -

MOCVD of YSZ coatings using β-diketonate precursors

Abstract

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Cite this