Abstract
Indium-doped cadmium oxide (In:CdO) thin films exhibit tunable epsilon-near-zero (ENZ) modal frequencies across a wide spectral range, bridging the mid-wave and near-infrared (IR). In:CdO thin films are prepared by reactive cosputtering from metallic Cd and In targets using high-power impulse magnetron sputtering (HiPIMS) and radio frequency sputtering, respectively. Using this approach, CdO thin films with carrier concentrations ranging from 2.3×1019 to 4.0×1020cm-3 and mobilities ranging from 300 to 400cm2/Vs are readily achieved. UV-VIS absorption spectra are used to measure optical bandgap, revealing a Burstein-Moss shift of 0.58 eV across the doping range investigated. Optical measurements demonstrate the tunability of near-perfect plasmonic ENZ absorption across the mid-wave and into the near-IR spectral ranges by controlling the carrier concentration through doping, while tuning the film thickness for impedance matching. In comparison to other dopants that can be introduced to HiPIMS-deposited CdO, In offers the largest range of carrier concentrations while maintaining high mobility, thus allowing for the widest accessibility of the IR spectrum of a single plasmonic material grown by sputtering.
Original language | English |
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Article number | 035202 |
Journal | Physical Review Materials |
Volume | 5 |
Issue number | 3 |
DOIs | |
State | Published - Mar 2021 |
Funding
We gratefully acknowledge support from Office of Naval Research (ONR) Grant No. N00012-18-1-2107 and Army Research Office (ARO) Grant No. W911NF-16-1-0406. We also received support from the Department of Defense (DoD) through the National Defense Science and Engineering Graduate (NDSEG) Fellowship Program. K.P.K acknowledges support from the Center for Nanophase Materials Sciences, which is a U.S. Department of Energy (DOE) Office of Science User Facility. Z.Q.M. acknowledges support from the U.S. National Science Foundation (NSF) under Grant No. DMR1707502. This work was also supported in part by the NSF I/UCRC on Multi-Functional Integrated System Technology (MIST) Center; IIP-1439644, IIP-1439680, IIP-1738752, IIP-1939009, IIP-1939050, and IIP-1939012.
Funders | Funder number |
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Center for Nanophase Materials Sciences | |
National Science Foundation | DMR1707502, IIP-1939009, IIP-1439644, IIP-1738752, IIP-1939012, IIP-1439680, IIP-1939050 |
U.S. Department of Defense | |
Office of Naval Research | N00012-18-1-2107 |
U.S. Department of Energy | |
Army Research Office | W911NF-16-1-0406 |
Office of Science | |
National Defense Science and Engineering Graduate |