Microwave integrated circuits using thin-film BST

R. York; A. Nagra; E. Erker; T. Taylor; P. Periaswamy; J. Speck; S. Streiffer; O. Auciello

Microwave integrated circuits using thin-film BST

R. York, A. Nagra, E. Erker, T. Taylor, P. Periaswamy, J. Speck, S. Streiffer, O. Auciello

Research output: Contribution to conference › Paper › peer-review

48 Scopus citations

Abstract

We discuss the development and potential applications of a microwave varactor technology using thin-films BST on inexpensive substrates. BST thin-films have been developed and optimized specifically for microwave integrated circuits, using both MOCVD-grown and RF magnetron-sputtered films. The material optimization efforts have concentrated on achieving high tunability and simultaneous low loss, and also developing robust electrode systems for circuit fabrication on silicon substrates. We present advances in monolithic microwave integrated capacitors and application to high performance and low-cost phase-shifters circuits. Efforts in frequency multiplication devices will also be presented.

Original language	English
Pages	195-200
Number of pages	6
State	Published - 2000
Externally published	Yes
Event	12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, United States Duration: Jul 21 2000 → Aug 2 2000

Conference

Conference	12th IEEE International Symposium on Applications of Ferroelectrics
Country/Territory	United States
City	Honolulu, HI
Period	07/21/00 → 08/2/00

Cite this

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abstract = "We discuss the development and potential applications of a microwave varactor technology using thin-films BST on inexpensive substrates. BST thin-films have been developed and optimized specifically for microwave integrated circuits, using both MOCVD-grown and RF magnetron-sputtered films. The material optimization efforts have concentrated on achieving high tunability and simultaneous low loss, and also developing robust electrode systems for circuit fabrication on silicon substrates. We present advances in monolithic microwave integrated capacitors and application to high performance and low-cost phase-shifters circuits. Efforts in frequency multiplication devices will also be presented.",

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T1 - Microwave integrated circuits using thin-film BST

AU - York, R.

AU - Nagra, A.

AU - Erker, E.

AU - Taylor, T.

AU - Periaswamy, P.

AU - Speck, J.

AU - Streiffer, S.

AU - Auciello, O.

PY - 2000

Y1 - 2000

N2 - We discuss the development and potential applications of a microwave varactor technology using thin-films BST on inexpensive substrates. BST thin-films have been developed and optimized specifically for microwave integrated circuits, using both MOCVD-grown and RF magnetron-sputtered films. The material optimization efforts have concentrated on achieving high tunability and simultaneous low loss, and also developing robust electrode systems for circuit fabrication on silicon substrates. We present advances in monolithic microwave integrated capacitors and application to high performance and low-cost phase-shifters circuits. Efforts in frequency multiplication devices will also be presented.

AB - We discuss the development and potential applications of a microwave varactor technology using thin-films BST on inexpensive substrates. BST thin-films have been developed and optimized specifically for microwave integrated circuits, using both MOCVD-grown and RF magnetron-sputtered films. The material optimization efforts have concentrated on achieving high tunability and simultaneous low loss, and also developing robust electrode systems for circuit fabrication on silicon substrates. We present advances in monolithic microwave integrated capacitors and application to high performance and low-cost phase-shifters circuits. Efforts in frequency multiplication devices will also be presented.

UR - http://www.scopus.com/inward/record.url?scp=0034470573&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0034470573

SP - 195

EP - 200

T2 - 12th IEEE International Symposium on Applications of Ferroelectrics

Y2 - 21 July 2000 through 2 August 2000

ER -

Microwave integrated circuits using thin-film BST

Abstract

Conference

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