Microstructure of epitaxial Pb(Mg1/3Nb2/3)O3-PbTiO3 thin films grown by metalorganic chemical vapor deposition

S. Stemmer, G. R. Bai, N. D. Browning, S. K. Streiffer

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24 Scopus citations

Abstract

Epitaxial, perovskite Pb(Mg1/3Nb2/3)O3-PbTiO3 films were grown by metalorganic chemical vapor deposition under various deposition conditions and characterized by x-ray diffraction and transmission electron microscopy. Pyrochlore free films were obtained under all deposition conditions used in this study. Magnesium-rich growth conditions lead to the formation of a Mg-rich impurity phase in the films, embedded as coherent lamellae parallel to the growth direction. Depending on the growth conditions, a wide variation in the stoichiometry and volume fraction of this impurity phase was found between samples, whereas morphology and crystal structure were found to be very similar.

Original languageEnglish
Pages (from-to)3526-3531
Number of pages6
JournalJournal of Applied Physics
Volume87
Issue number7
DOIs
StatePublished - Apr 2000
Externally publishedYes

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