Abstract
The microstructural changes after laser irradiation and electroless Cu deposition of AlN were examined using cross-sectional transmission electron microscopy samples. AlN substrates were irradiated in Ar+4%H2 with a XeCl pulsed excimer laser.
Original language | English |
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Pages | 636-637 |
Number of pages | 2 |
State | Published - 1994 |
Externally published | Yes |
Event | Proceedings of the 52nd Annual Meeting of the Microscopy Society of America - New Orleans, LA, USA Duration: Jul 31 1994 → Aug 5 1994 |
Conference
Conference | Proceedings of the 52nd Annual Meeting of the Microscopy Society of America |
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City | New Orleans, LA, USA |
Period | 07/31/94 → 08/5/94 |