Microstructural changes of aluminum nitride after laser irradiation and electroless copper deposition

Siqi Cao, A. J. Pedraza, L. F. Allard

Research output: Contribution to conferencePaperpeer-review

Abstract

The microstructural changes after laser irradiation and electroless Cu deposition of AlN were examined using cross-sectional transmission electron microscopy samples. AlN substrates were irradiated in Ar+4%H2 with a XeCl pulsed excimer laser.

Original languageEnglish
Pages636-637
Number of pages2
StatePublished - 1994
Externally publishedYes
EventProceedings of the 52nd Annual Meeting of the Microscopy Society of America - New Orleans, LA, USA
Duration: Jul 31 1994Aug 5 1994

Conference

ConferenceProceedings of the 52nd Annual Meeting of the Microscopy Society of America
CityNew Orleans, LA, USA
Period07/31/9408/5/94

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