Microfabricated field emission devices using carbon nanofibers as cathode elements

M. A. Guillorn; A. V. Melechko; V. I. Merkulov; E. D. Ellis; M. L. Simpson; D. H. Lowndes; L. R. Baylor; G. J. Bordonaro

doi:10.1116/1.1420201

Microfabricated field emission devices using carbon nanofibers as cathode elements

M. A. Guillorn
, A. V. Melechko
, V. I. Merkulov
, E. D. Ellis
, M. L. Simpson
, D. H. Lowndes
, L. R. Baylor
, G. J. Bordonaro

Research output: Contribution to journal › Article › peer-review

39 Scopus citations

Abstract

The field emission (FE) properties of isolated, deterministically grown vertically aligned carbon nanotubes and carbon nanofibers (VACNFs) were studied using a scanning current probe. Processing experiments were made with the VACNFs and show that they can survive CHF₃-based reactive ion etching (RIE) and plasma enhanced chemical vapor deposition (PECVD) SiO₂ deposition and removal. This allowed to develop a wafer scale production process for VACNF-based FEAs that uses standard microfabrication techniques and offers several possibilities for variation.

Original language	English
Pages (from-to)	2598-2601
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	19
Issue number	6
DOIs	https://doi.org/10.1116/1.1420201
State	Published - Nov 2001

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title = "Microfabricated field emission devices using carbon nanofibers as cathode elements",

abstract = "The field emission (FE) properties of isolated, deterministically grown vertically aligned carbon nanotubes and carbon nanofibers (VACNFs) were studied using a scanning current probe. Processing experiments were made with the VACNFs and show that they can survive CHF3-based reactive ion etching (RIE) and plasma enhanced chemical vapor deposition (PECVD) SiO2 deposition and removal. This allowed to develop a wafer scale production process for VACNF-based FEAs that uses standard microfabrication techniques and offers several possibilities for variation.",

author = "Guillorn, \{M. A.\} and Melechko, \{A. V.\} and Merkulov, \{V. I.\} and Ellis, \{E. D.\} and Simpson, \{M. L.\} and Lowndes, \{D. H.\} and Baylor, \{L. R.\} and Bordonaro, \{G. J.\}",

year = "2001",

month = nov,

doi = "10.1116/1.1420201",

language = "English",

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T1 - Microfabricated field emission devices using carbon nanofibers as cathode elements

AU - Guillorn, M. A.

AU - Melechko, A. V.

AU - Merkulov, V. I.

AU - Ellis, E. D.

AU - Simpson, M. L.

AU - Lowndes, D. H.

AU - Baylor, L. R.

AU - Bordonaro, G. J.

PY - 2001/11

Y1 - 2001/11

N2 - The field emission (FE) properties of isolated, deterministically grown vertically aligned carbon nanotubes and carbon nanofibers (VACNFs) were studied using a scanning current probe. Processing experiments were made with the VACNFs and show that they can survive CHF3-based reactive ion etching (RIE) and plasma enhanced chemical vapor deposition (PECVD) SiO2 deposition and removal. This allowed to develop a wafer scale production process for VACNF-based FEAs that uses standard microfabrication techniques and offers several possibilities for variation.

AB - The field emission (FE) properties of isolated, deterministically grown vertically aligned carbon nanotubes and carbon nanofibers (VACNFs) were studied using a scanning current probe. Processing experiments were made with the VACNFs and show that they can survive CHF3-based reactive ion etching (RIE) and plasma enhanced chemical vapor deposition (PECVD) SiO2 deposition and removal. This allowed to develop a wafer scale production process for VACNF-based FEAs that uses standard microfabrication techniques and offers several possibilities for variation.

UR - https://www.scopus.com/pages/publications/0035519758

U2 - 10.1116/1.1420201

DO - 10.1116/1.1420201

M3 - Article

AN - SCOPUS:0035519758

SN - 1071-1023

VL - 19

SP - 2598

EP - 2601

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Microfabricated field emission devices using carbon nanofibers as cathode elements

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