Microfabricated field emission devices using carbon nanofibers as cathode elements

M. A. Guillorn, A. V. Melechko, V. I. Merkulov, E. D. Ellis, M. L. Simpson, D. H. Lowndes, L. R. Baylor, G. J. Bordonaro

Research output: Contribution to journalArticlepeer-review

39 Scopus citations

Abstract

The field emission (FE) properties of isolated, deterministically grown vertically aligned carbon nanotubes and carbon nanofibers (VACNFs) were studied using a scanning current probe. Processing experiments were made with the VACNFs and show that they can survive CHF3-based reactive ion etching (RIE) and plasma enhanced chemical vapor deposition (PECVD) SiO2 deposition and removal. This allowed to develop a wafer scale production process for VACNF-based FEAs that uses standard microfabrication techniques and offers several possibilities for variation.

Original languageEnglish
Pages (from-to)2598-2601
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume19
Issue number6
DOIs
StatePublished - Nov 2001

Fingerprint

Dive into the research topics of 'Microfabricated field emission devices using carbon nanofibers as cathode elements'. Together they form a unique fingerprint.

Cite this