TY - JOUR
T1 - Microcantilever sensors
AU - Thundat, Thomas
AU - Oden, P. I.
AU - Warmack, R. J.
PY - 1997/7/1
Y1 - 1997/7/1
N2 - The advent of inexpensive, mass-produced microcantilevers promises to bring about a revolution in the field of chemical, physical, and biological sensor development. The microcantilever resonance responses such as resonance frequency, deflection, amplitude, and Q-factor undergo variation due to external stimuli. The resonance response variation can be due to mass loading, surface stress, or damping. When molecules adsorb on surfaces they can also produce a surface stress due to forces involved in the adsorption process and can be observed as changes in deflections of a thin microcantilever. In this article we review the technology and present a series of highly sensitive sensors that are based on commercially available microcantilevers used in atomic force microscopy.
AB - The advent of inexpensive, mass-produced microcantilevers promises to bring about a revolution in the field of chemical, physical, and biological sensor development. The microcantilever resonance responses such as resonance frequency, deflection, amplitude, and Q-factor undergo variation due to external stimuli. The resonance response variation can be due to mass loading, surface stress, or damping. When molecules adsorb on surfaces they can also produce a surface stress due to forces involved in the adsorption process and can be observed as changes in deflections of a thin microcantilever. In this article we review the technology and present a series of highly sensitive sensors that are based on commercially available microcantilevers used in atomic force microscopy.
UR - https://www.scopus.com/pages/publications/0039403201
U2 - 10.1080/108939597200214
DO - 10.1080/108939597200214
M3 - Article
AN - SCOPUS:0039403201
SN - 1089-3954
VL - 1
SP - 185
EP - 199
JO - Microscale Thermophysical Engineering
JF - Microscale Thermophysical Engineering
IS - 3
ER -