Methods to remove distortion artifacts in scanned projections

A. R. Kalukin; Z. H. Levine; C. Tarrio; S. P. Frigo; I. McNulty; Y. Wang; C. C. Retsch; M. Kuhn; B. Winn

Methods to remove distortion artifacts in scanned projections

A. R. Kalukin
, Z. H. Levine
, C. Tarrio
, S. P. Frigo
, I. McNulty
, Y. Wang
, C. C. Retsch
, M. Kuhn
, B. Winn

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

Artifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.

Original language	English
Pages (from-to)	237-245
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3772
State	Published - 1999
Externally published	Yes
Event	Proceedings of the 1999 Developments in X-Ray Tomography II - Denver, CO, USA Duration: Jul 22 1999 → Jul 23 1999

Cite this

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title = "Methods to remove distortion artifacts in scanned projections",

abstract = "Artifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.",

author = "Kalukin, \{A. R.\} and Levine, \{Z. H.\} and C. Tarrio and Frigo, \{S. P.\} and I. McNulty and Y. Wang and Retsch, \{C. C.\} and M. Kuhn and B. Winn",

year = "1999",

language = "English",

volume = "3772",

pages = "237--245",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "Society of Photo-Optical Instrumentation Engineers",

note = "Proceedings of the 1999 Developments in X-Ray Tomography II ; Conference date: 22-07-1999 Through 23-07-1999",

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TY - JOUR

T1 - Methods to remove distortion artifacts in scanned projections

AU - Kalukin, A. R.

AU - Levine, Z. H.

AU - Tarrio, C.

AU - Frigo, S. P.

AU - McNulty, I.

AU - Wang, Y.

AU - Retsch, C. C.

AU - Kuhn, M.

AU - Winn, B.

PY - 1999

Y1 - 1999

N2 - Artifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.

AB - Artifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.

UR - https://www.scopus.com/pages/publications/0032596604

M3 - Conference article

AN - SCOPUS:0032596604

SN - 0277-786X

VL - 3772

SP - 237

EP - 245

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Proceedings of the 1999 Developments in X-Ray Tomography II

Y2 - 22 July 1999 through 23 July 1999

ER -

Methods to remove distortion artifacts in scanned projections

Abstract

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