Methods to remove distortion artifacts in scanned projections

A. R. Kalukin; Z. H. Levine; C. Tarrio; S. P. Frigo; I. McNulty; Y. Wang; C. C. Retsch; M. Kuhn; B. Winn

Methods to remove distortion artifacts in scanned projections

A. R. Kalukin, Z. H. Levine, C. Tarrio, S. P. Frigo, I. McNulty, Y. Wang, C. C. Retsch, M. Kuhn, B. Winn

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

Artifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.

Original language	English
Pages (from-to)	237-245
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3772
State	Published - 1999
Externally published	Yes
Event	Proceedings of the 1999 Developments in X-Ray Tomography II - Denver, CO, USA Duration: Jul 22 1999 → Jul 23 1999

Cite this

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title = "Methods to remove distortion artifacts in scanned projections",

abstract = "Artifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.",

author = "Kalukin, {A. R.} and Levine, {Z. H.} and C. Tarrio and Frigo, {S. P.} and I. McNulty and Y. Wang and Retsch, {C. C.} and M. Kuhn and B. Winn",

year = "1999",

language = "English",

volume = "3772",

pages = "237--245",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "Society of Photo-Optical Instrumentation Engineers",

note = "Proceedings of the 1999 Developments in X-Ray Tomography II ; Conference date: 22-07-1999 Through 23-07-1999",

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TY - JOUR

T1 - Methods to remove distortion artifacts in scanned projections

AU - Kalukin, A. R.

AU - Levine, Z. H.

AU - Tarrio, C.

AU - Frigo, S. P.

AU - McNulty, I.

AU - Wang, Y.

AU - Retsch, C. C.

AU - Kuhn, M.

AU - Winn, B.

PY - 1999

Y1 - 1999

N2 - Artifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.

AB - Artifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.

UR - http://www.scopus.com/inward/record.url?scp=0032596604&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0032596604

SN - 0277-786X

VL - 3772

SP - 237

EP - 245

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Proceedings of the 1999 Developments in X-Ray Tomography II

Y2 - 22 July 1999 through 23 July 1999

ER -

Methods to remove distortion artifacts in scanned projections

Abstract

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