Abstract
A simple ionization model has been used to compute metastable beam populations for atomic ions formed in low density, high electron temperature ECR plasma type ion sources. Metastable fractions for each charge state of atomic carbon, nitrogen and oxygen have been evaluated. Computed metastable fractions are found to be in reasonable agreement with experimental data.
| Original language | English |
|---|---|
| Article number | 017 |
| Pages (from-to) | 3815-3823 |
| Number of pages | 9 |
| Journal | Journal of Physics B: Atomic, Molecular and Optical Physics |
| Volume | 24 |
| Issue number | 17 |
| DOIs | |
| State | Published - Sep 14 1991 |
| Externally published | Yes |