Metastable argon beam source using a surface wave sustained plasma

M. E. Bannister; J. L. Cecchi

doi:10.1116/1.578903

Metastable argon beam source using a surface wave sustained plasma

M. E. Bannister, J. L. Cecchi

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9 Scopus citations

Abstract

A new source of metastable argon atoms in the thermal energy range is reported. The source is based on expanding a plasma sustained by electromagnetic surface waves in a quartz tube through a converging nozzle and extracting a beam from the supersonic free-expansion jet. The beam was characterized by time-of-flight measurements which yielded the absolute intensity and velocity distribution of the argon metastables. The source produced a maximum intensity of 6.2X10¹⁴metastables per second per steradian, the highest time-averaged intensity of thermal argon metastables of any source reported to date. A simple picture of an expanding plasma in a recombination regime is used to explain the dependence of the metastable intensity on absorbed power.

Original language	English
Pages (from-to)	106-113
Number of pages	8
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	12
Issue number	1
DOIs	https://doi.org/10.1116/1.578903
State	Published - Jan 1994
Externally published	Yes

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@article{db745be9bb3d4e73a26cc3d2d87df4eb,

title = "Metastable argon beam source using a surface wave sustained plasma",

abstract = "A new source of metastable argon atoms in the thermal energy range is reported. The source is based on expanding a plasma sustained by electromagnetic surface waves in a quartz tube through a converging nozzle and extracting a beam from the supersonic free-expansion jet. The beam was characterized by time-of-flight measurements which yielded the absolute intensity and velocity distribution of the argon metastables. The source produced a maximum intensity of 6.2X1014metastables per second per steradian, the highest time-averaged intensity of thermal argon metastables of any source reported to date. A simple picture of an expanding plasma in a recombination regime is used to explain the dependence of the metastable intensity on absorbed power.",

author = "Bannister, {M. E.} and Cecchi, {J. L.}",

year = "1994",

month = jan,

doi = "10.1116/1.578903",

language = "English",

volume = "12",

pages = "106--113",

journal = "Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "American Vacuum Society",

number = "1",

}

TY - JOUR

T1 - Metastable argon beam source using a surface wave sustained plasma

AU - Bannister, M. E.

AU - Cecchi, J. L.

PY - 1994/1

Y1 - 1994/1

N2 - A new source of metastable argon atoms in the thermal energy range is reported. The source is based on expanding a plasma sustained by electromagnetic surface waves in a quartz tube through a converging nozzle and extracting a beam from the supersonic free-expansion jet. The beam was characterized by time-of-flight measurements which yielded the absolute intensity and velocity distribution of the argon metastables. The source produced a maximum intensity of 6.2X1014metastables per second per steradian, the highest time-averaged intensity of thermal argon metastables of any source reported to date. A simple picture of an expanding plasma in a recombination regime is used to explain the dependence of the metastable intensity on absorbed power.

AB - A new source of metastable argon atoms in the thermal energy range is reported. The source is based on expanding a plasma sustained by electromagnetic surface waves in a quartz tube through a converging nozzle and extracting a beam from the supersonic free-expansion jet. The beam was characterized by time-of-flight measurements which yielded the absolute intensity and velocity distribution of the argon metastables. The source produced a maximum intensity of 6.2X1014metastables per second per steradian, the highest time-averaged intensity of thermal argon metastables of any source reported to date. A simple picture of an expanding plasma in a recombination regime is used to explain the dependence of the metastable intensity on absorbed power.

UR - http://www.scopus.com/inward/record.url?scp=21344488986&partnerID=8YFLogxK

U2 - 10.1116/1.578903

DO - 10.1116/1.578903

M3 - Article

AN - SCOPUS:21344488986

SN - 0734-2101

VL - 12

SP - 106

EP - 113

JO - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

IS - 1

ER -

Metastable argon beam source using a surface wave sustained plasma

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