MEMS sensors with chemically selective coatings of ionic liquids

Eunhyea Chung, Nickolay Lavrik, Panos Datskos, Joanna McFarlane, Sheng Dai, Costas Tsouris

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A discussion covers the use of ionic liquids as coatings for microcantilever transducers with the goal of realizing selective detection of air and water quality parameters through micro-electro-mechanical-systems based sensors; advantages of ionic liquids; methods that reproducibly apply a coating of a selected ionic liquid on the surface of a microcantilever transducer and test the response of the cantilever in terms of bending and/or changes in oscillation frequency; response of coated cantilevers to various vapor analytes, e.g., water, acetone, and ethanol; and measurements with real atmospheric contaminants, e.g., NOx, ozone, and CO2; and ionic liquid coatings as suitable for microcantilever response of atmospheric and aqueous contaminants. This is an abstract of a paper presented at the 2007 AIChE Annual Meeting (Salt Lake City, UT 11/4-9/2007).

Original languageEnglish
Title of host publication2007 AIChE Annual Meeting
StatePublished - 2007
Event2007 AIChE Annual Meeting - Salt Lake City, UT, United States
Duration: Nov 4 2007Nov 9 2007

Publication series

Name2007 AIChE Annual Meeting

Conference

Conference2007 AIChE Annual Meeting
Country/TerritoryUnited States
CitySalt Lake City, UT
Period11/4/0711/9/07

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