Mechanism of Electron-Beam Manipulation of Single-Dopant Atoms in Silicon

Alexander Markevich, Bethany M. Hudak, Jacob Madsen, Jiaming Song, Paul C. Snijders, Andrew R. Lupini, Toma Susi

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

The precise positioning of dopant atoms within bulk crystal lattices could enable novel applications in areas including solid-state sensing and quantum computation. Established scanning probe techniques are capable tools for the manipulation of surface atoms, but at a disadvantage due to their need to bring a physical tip into contact with the sample. This has prompted interest in electron-beam techniques, followed by the first proof-of-principle experiment of bismuth dopant manipulation in crystalline silicon. Here, we use first-principles modeling to discover a novel indirect exchange mechanism that allows electron impacts to non-destructively move dopants with atomic precision within the silicon lattice. However, this mechanism only works for the two heaviest group V donors with split-vacancy configurations, Bi and Sb. We verify our model by directly imaging these configurations for Bi and by demonstrating that the promising nuclear spin qubit Sb can be manipulated using a focused electron beam.

Original languageEnglish
Pages (from-to)16041-16048
Number of pages8
JournalJournal of Physical Chemistry C
Volume125
Issue number29
DOIs
StatePublished - Jul 29 2021

Funding

The authors thank J. Meyers for the cross-section specimen preparation and J. Kotakoski for useful discussions. A.M., J.M., and T.S. were supported by the European Research Council (ERC) under the European Union’s Horizon 2020 research and innovation programme (grant agreement no. 756277-ATMEN) and acknowledge computational resources provided by the Vienna Scientific Cluster. Electron microscopy work (B.M.H. and A.R.L.) was supported by the U.S. Department of Energy, Office of Science, Basic Energy Sciences, Division of Materials Sciences and Engineering, and sample growth (P.C.S. and J.S.) by the Laboratory Directed Research and Development Program of Oak Ridge National Laboratory, managed by UT-Battelle, LLC for the U.S. Department of Energy and performed at the Oak Ridge National Laboratory’s Center for Nanophase Materials Sciences (CNMS), a U.S. Department of Energy Office of Science User Facility.

FundersFunder number
CNMS
Oak Ridge National Laboratory
U.S. Department of Energy
Office of Science
Basic Energy Sciences
Oak Ridge National Laboratory
Horizon 2020 Framework Programme756277
Division of Materials Sciences and Engineering
UT-Battelle
European Research Council

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