TY - JOUR
T1 - Measurement of thermally-induced strains in polycrystalline Al thin films on Si using convergent beam electron diffraction
AU - Streiffer, S. K.
AU - Bader, S.
AU - Deininger, C.
AU - Mayer, J.
AU - Ruehle, M.
PY - 1994
Y1 - 1994
N2 - Strains in polycrystalline Al films grown on oxidized Si wafers were measured using convergent beam electron diffraction (CBED). CBED patterns were acquired on a Zeiss EM 912 TEM equipped with an imaging energy filter and CCD camera. HOLZ line positions in the (000) CBED disk were matched using an automated refinement procedure. A sensitivity to variations in lattice parameter of approximately 0.00007 nm was obtained. Strong deviations from a simple equibiaxial strain, perfect [111] texture model were observed.
AB - Strains in polycrystalline Al films grown on oxidized Si wafers were measured using convergent beam electron diffraction (CBED). CBED patterns were acquired on a Zeiss EM 912 TEM equipped with an imaging energy filter and CCD camera. HOLZ line positions in the (000) CBED disk were matched using an automated refinement procedure. A sensitivity to variations in lattice parameter of approximately 0.00007 nm was obtained. Strong deviations from a simple equibiaxial strain, perfect [111] texture model were observed.
UR - http://www.scopus.com/inward/record.url?scp=0028583654&partnerID=8YFLogxK
U2 - 10.1557/proc-343-615
DO - 10.1557/proc-343-615
M3 - Conference article
AN - SCOPUS:0028583654
SN - 0272-9172
VL - 343
SP - 615
EP - 620
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Proceedings of the 1994 MRS Spring Meeting
Y2 - 5 April 1994 through 8 April 1994
ER -