Measurement of piezoelectric displacements of Pb(Zr,Ti)O3 thin films using a double-beam interferometer

Hiroshi Maiwa; James A. Christman; Seung Hyun Kim; Dong Joo Kim; Jon Paul Maria; Barry Chen; Stephen K. Streiffer; Angus I. Kingon

doi:10.1143/jjap.38.5402

Measurement of piezoelectric displacements of Pb(Zr,Ti)O₃ thin films using a double-beam interferometer

Hiroshi Maiwa, James A. Christman, Seung Hyun Kim, Dong Joo Kim, Jon Paul Maria, Barry Chen, Stephen K. Streiffer, Angus I. Kingon

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

The double-beam interferometric method is applied to measure the field-induced displacement of Pb(Zr,Ti)O₃ thin films. The dc electric field dependence of the longitudinal piezoelectric coefficient (d₃₃) response of Pb(Zr, Ti)O₃ thin films deposited by metal organic chemical vapor deposition (MOCVD) was measured. Experimental d₃₃ values were compared with coefficients calculated using a phenomenological approach and bulk parameters. Qualitative agreement was obtained between measured and calculated coefficients.

Original language	English
Pages (from-to)	5402-5405
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	38
Issue number	9 B
DOIs	https://doi.org/10.1143/jjap.38.5402
State	Published - 1999
Externally published	Yes

Keywords

AFM
Double-beam interferometry
MEMS
Piezoelectric properties
PZT

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10.1143/jjap.38.5402

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title = "Measurement of piezoelectric displacements of Pb(Zr,Ti)O3 thin films using a double-beam interferometer",

abstract = "The double-beam interferometric method is applied to measure the field-induced displacement of Pb(Zr,Ti)O3 thin films. The dc electric field dependence of the longitudinal piezoelectric coefficient (d33) response of Pb(Zr, Ti)O3 thin films deposited by metal organic chemical vapor deposition (MOCVD) was measured. Experimental d33 values were compared with coefficients calculated using a phenomenological approach and bulk parameters. Qualitative agreement was obtained between measured and calculated coefficients.",

keywords = "AFM, Double-beam interferometry, MEMS, Piezoelectric properties, PZT",

author = "Hiroshi Maiwa and Christman, {James A.} and Kim, {Seung Hyun} and Kim, {Dong Joo} and Maria, {Jon Paul} and Barry Chen and Streiffer, {Stephen K.} and Kingon, {Angus I.}",

year = "1999",

doi = "10.1143/jjap.38.5402",

language = "English",

volume = "38",

pages = "5402--5405",

journal = "Japanese Journal of Applied Physics, Part 2: Letters",

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publisher = "IOP Publishing",

number = "9 B",

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TY - JOUR

T1 - Measurement of piezoelectric displacements of Pb(Zr,Ti)O3 thin films using a double-beam interferometer

AU - Maiwa, Hiroshi

AU - Christman, James A.

AU - Kim, Seung Hyun

AU - Kim, Dong Joo

AU - Maria, Jon Paul

AU - Chen, Barry

AU - Streiffer, Stephen K.

AU - Kingon, Angus I.

PY - 1999

Y1 - 1999

N2 - The double-beam interferometric method is applied to measure the field-induced displacement of Pb(Zr,Ti)O3 thin films. The dc electric field dependence of the longitudinal piezoelectric coefficient (d33) response of Pb(Zr, Ti)O3 thin films deposited by metal organic chemical vapor deposition (MOCVD) was measured. Experimental d33 values were compared with coefficients calculated using a phenomenological approach and bulk parameters. Qualitative agreement was obtained between measured and calculated coefficients.

AB - The double-beam interferometric method is applied to measure the field-induced displacement of Pb(Zr,Ti)O3 thin films. The dc electric field dependence of the longitudinal piezoelectric coefficient (d33) response of Pb(Zr, Ti)O3 thin films deposited by metal organic chemical vapor deposition (MOCVD) was measured. Experimental d33 values were compared with coefficients calculated using a phenomenological approach and bulk parameters. Qualitative agreement was obtained between measured and calculated coefficients.

KW - AFM

KW - Double-beam interferometry

KW - MEMS

KW - Piezoelectric properties

KW - PZT

UR - http://www.scopus.com/inward/record.url?scp=0033341681&partnerID=8YFLogxK

U2 - 10.1143/jjap.38.5402

DO - 10.1143/jjap.38.5402

M3 - Article

AN - SCOPUS:0033341681

SN - 0021-4922

VL - 38

SP - 5402

EP - 5405

JO - Japanese Journal of Applied Physics, Part 2: Letters

JF - Japanese Journal of Applied Physics, Part 2: Letters

IS - 9 B

ER -

Measurement of piezoelectric displacements of Pb(Zr,Ti)O₃ thin films using a double-beam interferometer

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Keywords

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