TY - JOUR
T1 - Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients
AU - Maiwa, H.
AU - Maria, J. P.
AU - Christman, J. A.
AU - Kim, S. H.
AU - Streiffer, S. K.
AU - Kingon, A. I.
PY - 1999
Y1 - 1999
N2 - The ferroelectric and piezoelectric properties of 2000 angstrom thick chemical solution deposited Pb(ZrxTi1-x)O3 (PZT) thin films were investigated. Several Zr/Ti ratios were studied: 30/70, 50/50 and 65/35, which correspond to tetragonal, near-morphotropic, and rhombohedral symmetries. In all samples, a {111}-texture is predominant. Longitudinal piezoelectric coefficients and their dc field dependence were measured using the contact AFM method. The expected trend of a maximum piezoelectric coefficient at or near to the MPB was not observed. The composition dependence was small, with the maximum d33 occurring in the tetragonal material. To explain the results, crystallographic texture and film thickness effects are suggested. Using a modified phenomenological approach, derived electrostrictive coefficients, and experimental data, d33 values were calculated. Qualitative agreement was observed between the measured and calculated coefficients. Justifications of modifications to the calculations are discussed.
AB - The ferroelectric and piezoelectric properties of 2000 angstrom thick chemical solution deposited Pb(ZrxTi1-x)O3 (PZT) thin films were investigated. Several Zr/Ti ratios were studied: 30/70, 50/50 and 65/35, which correspond to tetragonal, near-morphotropic, and rhombohedral symmetries. In all samples, a {111}-texture is predominant. Longitudinal piezoelectric coefficients and their dc field dependence were measured using the contact AFM method. The expected trend of a maximum piezoelectric coefficient at or near to the MPB was not observed. The composition dependence was small, with the maximum d33 occurring in the tetragonal material. To explain the results, crystallographic texture and film thickness effects are suggested. Using a modified phenomenological approach, derived electrostrictive coefficients, and experimental data, d33 values were calculated. Qualitative agreement was observed between the measured and calculated coefficients. Justifications of modifications to the calculations are discussed.
UR - http://www.scopus.com/inward/record.url?scp=0033295902&partnerID=8YFLogxK
U2 - 10.1080/10584589908215586
DO - 10.1080/10584589908215586
M3 - Conference article
AN - SCOPUS:0033295902
SN - 1058-4587
VL - 24
SP - 139
EP - 146
JO - Integrated Ferroelectrics
JF - Integrated Ferroelectrics
IS - 1
T2 - The 11th International Symposium on Integrated Ferroelectrics (ISIF99)
Y2 - 7 March 1999 through 10 March 1999
ER -