Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients

H. Maiwa; J. P. Maria; J. A. Christman; S. H. Kim; S. K. Streiffer; A. I. Kingon

doi:10.1080/10584589908215586

Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients

H. Maiwa, J. P. Maria, J. A. Christman, S. H. Kim, S. K. Streiffer, A. I. Kingon

Research output: Contribution to journal › Conference article › peer-review

26 Scopus citations

Abstract

The ferroelectric and piezoelectric properties of 2000 angstrom thick chemical solution deposited Pb(Zr_xTi_1-x)O₃ (PZT) thin films were investigated. Several Zr/Ti ratios were studied: 30/70, 50/50 and 65/35, which correspond to tetragonal, near-morphotropic, and rhombohedral symmetries. In all samples, a {111}-texture is predominant. Longitudinal piezoelectric coefficients and their dc field dependence were measured using the contact AFM method. The expected trend of a maximum piezoelectric coefficient at or near to the MPB was not observed. The composition dependence was small, with the maximum d₃₃ occurring in the tetragonal material. To explain the results, crystallographic texture and film thickness effects are suggested. Using a modified phenomenological approach, derived electrostrictive coefficients, and experimental data, d₃₃ values were calculated. Qualitative agreement was observed between the measured and calculated coefficients. Justifications of modifications to the calculations are discussed.

Original language	English
Pages (from-to)	139-146
Number of pages	8
Journal	Integrated Ferroelectrics
Volume	24
Issue number	1
DOIs	https://doi.org/10.1080/10584589908215586
State	Published - 1999
Externally published	Yes
Event	The 11th International Symposium on Integrated Ferroelectrics (ISIF99) - Colorado Springs, CO, USA Duration: Mar 7 1999 → Mar 10 1999

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@article{f3c2c1e76d6b4e288d504b915e76c147,

title = "Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients",

abstract = "The ferroelectric and piezoelectric properties of 2000 angstrom thick chemical solution deposited Pb(ZrxTi1-x)O3 (PZT) thin films were investigated. Several Zr/Ti ratios were studied: 30/70, 50/50 and 65/35, which correspond to tetragonal, near-morphotropic, and rhombohedral symmetries. In all samples, a {111}-texture is predominant. Longitudinal piezoelectric coefficients and their dc field dependence were measured using the contact AFM method. The expected trend of a maximum piezoelectric coefficient at or near to the MPB was not observed. The composition dependence was small, with the maximum d33 occurring in the tetragonal material. To explain the results, crystallographic texture and film thickness effects are suggested. Using a modified phenomenological approach, derived electrostrictive coefficients, and experimental data, d33 values were calculated. Qualitative agreement was observed between the measured and calculated coefficients. Justifications of modifications to the calculations are discussed.",

author = "H. Maiwa and Maria, {J. P.} and Christman, {J. A.} and Kim, {S. H.} and Streiffer, {S. K.} and Kingon, {A. I.}",

year = "1999",

doi = "10.1080/10584589908215586",

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volume = "24",

pages = "139--146",

journal = "Integrated Ferroelectrics",

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note = "The 11th International Symposium on Integrated Ferroelectrics (ISIF99) ; Conference date: 07-03-1999 Through 10-03-1999",

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TY - JOUR

T1 - Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients

AU - Maiwa, H.

AU - Maria, J. P.

AU - Christman, J. A.

AU - Kim, S. H.

AU - Streiffer, S. K.

AU - Kingon, A. I.

PY - 1999

Y1 - 1999

N2 - The ferroelectric and piezoelectric properties of 2000 angstrom thick chemical solution deposited Pb(ZrxTi1-x)O3 (PZT) thin films were investigated. Several Zr/Ti ratios were studied: 30/70, 50/50 and 65/35, which correspond to tetragonal, near-morphotropic, and rhombohedral symmetries. In all samples, a {111}-texture is predominant. Longitudinal piezoelectric coefficients and their dc field dependence were measured using the contact AFM method. The expected trend of a maximum piezoelectric coefficient at or near to the MPB was not observed. The composition dependence was small, with the maximum d33 occurring in the tetragonal material. To explain the results, crystallographic texture and film thickness effects are suggested. Using a modified phenomenological approach, derived electrostrictive coefficients, and experimental data, d33 values were calculated. Qualitative agreement was observed between the measured and calculated coefficients. Justifications of modifications to the calculations are discussed.

AB - The ferroelectric and piezoelectric properties of 2000 angstrom thick chemical solution deposited Pb(ZrxTi1-x)O3 (PZT) thin films were investigated. Several Zr/Ti ratios were studied: 30/70, 50/50 and 65/35, which correspond to tetragonal, near-morphotropic, and rhombohedral symmetries. In all samples, a {111}-texture is predominant. Longitudinal piezoelectric coefficients and their dc field dependence were measured using the contact AFM method. The expected trend of a maximum piezoelectric coefficient at or near to the MPB was not observed. The composition dependence was small, with the maximum d33 occurring in the tetragonal material. To explain the results, crystallographic texture and film thickness effects are suggested. Using a modified phenomenological approach, derived electrostrictive coefficients, and experimental data, d33 values were calculated. Qualitative agreement was observed between the measured and calculated coefficients. Justifications of modifications to the calculations are discussed.

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U2 - 10.1080/10584589908215586

DO - 10.1080/10584589908215586

M3 - Conference article

AN - SCOPUS:0033295902

SN - 1058-4587

VL - 24

SP - 139

EP - 146

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1

T2 - The 11th International Symposium on Integrated Ferroelectrics (ISIF99)

Y2 - 7 March 1999 through 10 March 1999

ER -

Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients

Abstract

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