Maskless inverted pyramid texturization of silicon

Yan Wang, Lixia Yang, Yaoping Liu, Zengxia Mei, Wei Chen, Junqiang Li, Huili Liang, Andrej Kuznetsov, Du Xiaolong

Research output: Contribution to journalArticlepeer-review

113 Scopus citations

Abstract

We discovered a technical solution of such outstanding importance that it can trigger new approaches in silicon wet etching processing and, in particular, photovoltaic cell manufacturing. The so called inverted pyramid arrays, outperforming conventional pyramid textures and black silicon because of their superior light-trapping and structure characteristics, can currently only be achieved using more complex techniques involving lithography, laser processing, etc. Importantly, our data demonstrate a feasibility of inverted pyramidal texturization of silicon by maskless Cu-nanoparticles assisted etching in Cu(NO3)2/ HF / H2O2 / H2O solutions and as such may have significant impacts on communities of fellow researchers and industrialists.

Original languageEnglish
Article number10843
JournalScientific Reports
Volume5
DOIs
StatePublished - Jun 2 2015
Externally publishedYes

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