Low jitter and drift high voltage IGBT gate driver

The Cymer Master Oscillator Power Amplifier (MOPA)-based light source requires tight timing control over all operating repetition rates. The newly developed IGBT gate driver allows tight control of the IGBT's turn on/off timing jitter and drift. Its performance is significantly improved compared to the previous IGBT gate driver. Switching rate improvement of the new driver reduces the time spent in the IGBT's active switching region and therefore helps reduce losses. These improvements allow for better control of IGBT triggering and laser performance. This paper will provide the IGBT gate driver general development approaches, performance and high voltage IGBT switching test results. The new IGBT gate driver meets the requirements for Cymer's MOPA-based laser systems.