Abstract
Advancing Silicon (Si) technology beyond Moore's law through 3D architectures requires highly efficient heat management methods compatible with foundry processes. While continued increases in transistor density can be achieved through 3D architectures, self-heating in the upper tiers degrades the performance. Self-heating is a critical problem for high-power, high-frequency, wide bandgap, and ultra-wide bandgap devices as well. Diamond, known for its exceptional thermal conductivity, offers a viable solution in both these cases. Since thermal boundary resistance (between the channel/junction and diamond plays a crucial role in overall thermal resistance, this study investigates various dielectrics for interface engineering, such as Silicon dioxide (SiO2), amorphous- Silicon Carbide (a-SiC), and Silicon Nitride (SiNx), to make a phonon bridge at gallium nitride (GaN)-diamond and Si-diamond interfaces. The a-SiC interlayer reduces diamond/GaN (<5 m2K per GW) and diamond/Si (<2 m2K per GW) thermal boundary resistances by linking low- and high-frequency phonons, boosting phonon transport through the interface. Engineered interfaces enhance heat spreading from the channel/junction and rule out premature failure.
| Original language | English |
|---|---|
| Article number | 2400146 |
| Journal | Advanced Electronic Materials |
| Volume | 11 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 2025 |
| Externally published | Yes |
Funding
This work was supported in part by DARPA-DSSP, the SystemX Alliance program at Stanford University, and ULTRA, an Energy Frontier Research Center funded by the US Department of Energy (DOE), Office of Science, Basic Energy Sciences (BES). P.H. and T.P. appreciate the support from the Office of Naval Research Grant Number N00014-23-1-2630. This work was supported in part by DARPA‐DSSP, the SystemX Alliance program at Stanford University, and ULTRA, an Energy Frontier Research Center funded by the US Department of Energy (DOE), Office of Science, Basic Energy Sciences (BES). P.H. and T.P. appreciate the support from the Office of Naval Research Grant Number N00014‐23‐1‐2630.
Keywords
- Moore's law
- diamond
- interface engineering
- thermal boundary resistance
- thermal management
- ultra-wide-bandgap
- wide-bandgap
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