Loss measurements and stoichiometric dependence of Ti and O implanted LiNbO3 waveguides

E. K. Williams; D. Ila; S. Sarkisov; P. Venkateswarlu; D. B. Poker; D. K. Hensley

doi:10.1016/S0168-583X(96)00981-0

Loss measurements and stoichiometric dependence of Ti and O implanted LiNbO₃ waveguides

E. K. Williams
, D. Ila
, S. Sarkisov
, P. Venkateswarlu
, D. B. Poker
, D. K. Hensley

Nanofabrication Research Laboratory

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Planar waveguides created by the implantation at 500°C of 2.5 × 10¹⁷ Ti ions/cm² and 2.5, 5.0 and 7.5 × 1017 O ions/cm² have been characterized for loss by the scattered light and cutback techniques. Results indicate losses of less than 2.5 dB/cm to 3 dB/cm for waveguides with a Ti:O ratio of 1:3 and losses of over 7 dB/cm2 for waveguides with Ti:O ratios of 1:1 and 1:2.

Original language	English
Pages (from-to)	512-514
Number of pages	3
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	127-128
DOIs	https://doi.org/10.1016/S0168-583X(96)00981-0
State	Published - May 1997

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@article{a572f852272d44eba6c41247f3160be6,

title = "Loss measurements and stoichiometric dependence of Ti and O implanted LiNbO3 waveguides",

abstract = "Planar waveguides created by the implantation at 500°C of 2.5 × 1017 Ti ions/cm2 and 2.5, 5.0 and 7.5 × 1017 O ions/cm2 have been characterized for loss by the scattered light and cutback techniques. Results indicate losses of less than 2.5 dB/cm to 3 dB/cm for waveguides with a Ti:O ratio of 1:3 and losses of over 7 dB/cm2 for waveguides with Ti:O ratios of 1:1 and 1:2.",

author = "Williams, \{E. K.\} and D. Ila and S. Sarkisov and P. Venkateswarlu and Poker, \{D. B.\} and Hensley, \{D. K.\}",

year = "1997",

month = may,

doi = "10.1016/S0168-583X(96)00981-0",

language = "English",

volume = "127-128",

pages = "512--514",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

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TY - JOUR

T1 - Loss measurements and stoichiometric dependence of Ti and O implanted LiNbO3 waveguides

AU - Williams, E. K.

AU - Ila, D.

AU - Sarkisov, S.

AU - Venkateswarlu, P.

AU - Poker, D. B.

AU - Hensley, D. K.

PY - 1997/5

Y1 - 1997/5

N2 - Planar waveguides created by the implantation at 500°C of 2.5 × 1017 Ti ions/cm2 and 2.5, 5.0 and 7.5 × 1017 O ions/cm2 have been characterized for loss by the scattered light and cutback techniques. Results indicate losses of less than 2.5 dB/cm to 3 dB/cm for waveguides with a Ti:O ratio of 1:3 and losses of over 7 dB/cm2 for waveguides with Ti:O ratios of 1:1 and 1:2.

AB - Planar waveguides created by the implantation at 500°C of 2.5 × 1017 Ti ions/cm2 and 2.5, 5.0 and 7.5 × 1017 O ions/cm2 have been characterized for loss by the scattered light and cutback techniques. Results indicate losses of less than 2.5 dB/cm to 3 dB/cm for waveguides with a Ti:O ratio of 1:3 and losses of over 7 dB/cm2 for waveguides with Ti:O ratios of 1:1 and 1:2.

UR - https://www.scopus.com/pages/publications/0031547617

U2 - 10.1016/S0168-583X(96)00981-0

DO - 10.1016/S0168-583X(96)00981-0

M3 - Article

AN - SCOPUS:0031547617

SN - 0168-583X

VL - 127-128

SP - 512

EP - 514

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

Loss measurements and stoichiometric dependence of Ti and O implanted LiNbO₃ waveguides

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