Abstract
The processing and microstructure of carbon coatings deposited using liquid reagent CVD were studied. High density pyrolytic carbon coatings were successfully deposited on graphite and molybdenum substrates from benzene and cyclohexane precursors. Very high deposition rates were obtained. Examination via transmission electron microscopy showed that the deposits were of the desired turbostratic nodular structure with low texture.
Original language | English |
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Pages (from-to) | 1895-1900 |
Number of pages | 6 |
Journal | Carbon |
Volume | 42 |
Issue number | 10 |
DOIs | |
State | Published - 2004 |
Keywords
- A. Pyrolytic carbon
- B. Chemical vapor deposition
- C. Transmission electron microscopy, X-ray diffraction
- D. Microstructure