Liquid reagent CVD of carbon. I. Processing and microstructure

M. X. Jiang, W. J. Lackey, K. More

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

The processing and microstructure of carbon coatings deposited using liquid reagent CVD were studied. High density pyrolytic carbon coatings were successfully deposited on graphite and molybdenum substrates from benzene and cyclohexane precursors. Very high deposition rates were obtained. Examination via transmission electron microscopy showed that the deposits were of the desired turbostratic nodular structure with low texture.

Original languageEnglish
Pages (from-to)1895-1900
Number of pages6
JournalCarbon
Volume42
Issue number10
DOIs
StatePublished - 2004

Keywords

  • A. Pyrolytic carbon
  • B. Chemical vapor deposition
  • C. Transmission electron microscopy, X-ray diffraction
  • D. Microstructure

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