Lead Zirconate Titanate Thin Films on Base-Metal Foils: An Approach for Embedded High-Permittivity Passive Components

Jon Paul Maria; Kevin Cheek; Stephen Streiffer; Seung Hyun Kim; Greg Dunn; Angus Kingon

doi:10.1111/j.1151-2916.2001.tb01029.x

Lead Zirconate Titanate Thin Films on Base-Metal Foils: An Approach for Embedded High-Permittivity Passive Components

Jon Paul Maria
, Kevin Cheek
, Stephen Streiffer
, Seung Hyun Kim
, Greg Dunn
, Angus Kingon

Research output: Contribution to journal › Article › peer-review

100 Scopus citations

Abstract

An approach for embedding high-permittivity dielectric thin films into glass epoxy laminate packages has been developed. Lead lanthanum zirconate titanate (Pb_0.85La_0.15-(Zr_0.52Ti_0.48) _0.96O₃, PLZT) thin films were prepared using chemical solution deposition on nickel-coated copper foils that were 50 μm thick. Sputter-deposited nickel top electrodes completed the all-base-metal capacitor stack. After high-temperature nitrogen-gas crystallization anneals, the PLZT composition showed no signs of reduction, whereas the base-metal foils remained flexible. The capacitance density was 300-400 nF/cm², and the loss tangent was 0.01-0.02 over a frequency range of 1-1000 kHz. These properties represent a potential improvement of 2-3 orders of magnitude over currently available embedded capacitor technologies for polymeric packages.

Original language	English
Pages (from-to)	2436-2438
Number of pages	3
Journal	Journal of the American Ceramic Society
Volume	84
Issue number	10
DOIs	https://doi.org/10.1111/j.1151-2916.2001.tb01029.x
State	Published - Oct 2001
Externally published	Yes

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10.1111/j.1151-2916.2001.tb01029.x

Cite this

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title = "Lead Zirconate Titanate Thin Films on Base-Metal Foils: An Approach for Embedded High-Permittivity Passive Components",

abstract = "An approach for embedding high-permittivity dielectric thin films into glass epoxy laminate packages has been developed. Lead lanthanum zirconate titanate (Pb0.85La0.15-(Zr0.52Ti0.48) 0.96O3, PLZT) thin films were prepared using chemical solution deposition on nickel-coated copper foils that were 50 μm thick. Sputter-deposited nickel top electrodes completed the all-base-metal capacitor stack. After high-temperature nitrogen-gas crystallization anneals, the PLZT composition showed no signs of reduction, whereas the base-metal foils remained flexible. The capacitance density was 300-400 nF/cm2, and the loss tangent was 0.01-0.02 over a frequency range of 1-1000 kHz. These properties represent a potential improvement of 2-3 orders of magnitude over currently available embedded capacitor technologies for polymeric packages.",

author = "Maria, \{Jon Paul\} and Kevin Cheek and Stephen Streiffer and Kim, \{Seung Hyun\} and Greg Dunn and Angus Kingon",

year = "2001",

month = oct,

doi = "10.1111/j.1151-2916.2001.tb01029.x",

language = "English",

volume = "84",

pages = "2436--2438",

journal = "Journal of the American Ceramic Society",

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T2 - An Approach for Embedded High-Permittivity Passive Components

AU - Maria, Jon Paul

AU - Cheek, Kevin

AU - Streiffer, Stephen

AU - Kim, Seung Hyun

AU - Dunn, Greg

AU - Kingon, Angus

PY - 2001/10

Y1 - 2001/10

N2 - An approach for embedding high-permittivity dielectric thin films into glass epoxy laminate packages has been developed. Lead lanthanum zirconate titanate (Pb0.85La0.15-(Zr0.52Ti0.48) 0.96O3, PLZT) thin films were prepared using chemical solution deposition on nickel-coated copper foils that were 50 μm thick. Sputter-deposited nickel top electrodes completed the all-base-metal capacitor stack. After high-temperature nitrogen-gas crystallization anneals, the PLZT composition showed no signs of reduction, whereas the base-metal foils remained flexible. The capacitance density was 300-400 nF/cm2, and the loss tangent was 0.01-0.02 over a frequency range of 1-1000 kHz. These properties represent a potential improvement of 2-3 orders of magnitude over currently available embedded capacitor technologies for polymeric packages.

AB - An approach for embedding high-permittivity dielectric thin films into glass epoxy laminate packages has been developed. Lead lanthanum zirconate titanate (Pb0.85La0.15-(Zr0.52Ti0.48) 0.96O3, PLZT) thin films were prepared using chemical solution deposition on nickel-coated copper foils that were 50 μm thick. Sputter-deposited nickel top electrodes completed the all-base-metal capacitor stack. After high-temperature nitrogen-gas crystallization anneals, the PLZT composition showed no signs of reduction, whereas the base-metal foils remained flexible. The capacitance density was 300-400 nF/cm2, and the loss tangent was 0.01-0.02 over a frequency range of 1-1000 kHz. These properties represent a potential improvement of 2-3 orders of magnitude over currently available embedded capacitor technologies for polymeric packages.

UR - https://www.scopus.com/pages/publications/0035497590

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DO - 10.1111/j.1151-2916.2001.tb01029.x

M3 - Article

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ER -

Lead Zirconate Titanate Thin Films on Base-Metal Foils: An Approach for Embedded High-Permittivity Passive Components

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