TY - JOUR
T1 - Lead Zirconate Titanate Thin Films on Base-Metal Foils
T2 - An Approach for Embedded High-Permittivity Passive Components
AU - Maria, Jon Paul
AU - Cheek, Kevin
AU - Streiffer, Stephen
AU - Kim, Seung Hyun
AU - Dunn, Greg
AU - Kingon, Angus
PY - 2001/10
Y1 - 2001/10
N2 - An approach for embedding high-permittivity dielectric thin films into glass epoxy laminate packages has been developed. Lead lanthanum zirconate titanate (Pb0.85La0.15-(Zr0.52Ti0.48) 0.96O3, PLZT) thin films were prepared using chemical solution deposition on nickel-coated copper foils that were 50 μm thick. Sputter-deposited nickel top electrodes completed the all-base-metal capacitor stack. After high-temperature nitrogen-gas crystallization anneals, the PLZT composition showed no signs of reduction, whereas the base-metal foils remained flexible. The capacitance density was 300-400 nF/cm2, and the loss tangent was 0.01-0.02 over a frequency range of 1-1000 kHz. These properties represent a potential improvement of 2-3 orders of magnitude over currently available embedded capacitor technologies for polymeric packages.
AB - An approach for embedding high-permittivity dielectric thin films into glass epoxy laminate packages has been developed. Lead lanthanum zirconate titanate (Pb0.85La0.15-(Zr0.52Ti0.48) 0.96O3, PLZT) thin films were prepared using chemical solution deposition on nickel-coated copper foils that were 50 μm thick. Sputter-deposited nickel top electrodes completed the all-base-metal capacitor stack. After high-temperature nitrogen-gas crystallization anneals, the PLZT composition showed no signs of reduction, whereas the base-metal foils remained flexible. The capacitance density was 300-400 nF/cm2, and the loss tangent was 0.01-0.02 over a frequency range of 1-1000 kHz. These properties represent a potential improvement of 2-3 orders of magnitude over currently available embedded capacitor technologies for polymeric packages.
UR - http://www.scopus.com/inward/record.url?scp=0035497590&partnerID=8YFLogxK
U2 - 10.1111/j.1151-2916.2001.tb01029.x
DO - 10.1111/j.1151-2916.2001.tb01029.x
M3 - Article
AN - SCOPUS:0035497590
SN - 0002-7820
VL - 84
SP - 2436
EP - 2438
JO - Journal of the American Ceramic Society
JF - Journal of the American Ceramic Society
IS - 10
ER -