Layer-by-layer and pseudo-two-dimensional growth modes for heteroepitaxial BaTiO3 films by exploiting kinetic limitations

Junsoo Shin; S. V. Kalinin; A. Y. Borisevich; E. W. Plummer; A. P. Baddorf

doi:10.1063/1.2790477

Layer-by-layer and pseudo-two-dimensional growth modes for heteroepitaxial BaTiO₃ films by exploiting kinetic limitations

Junsoo Shin, S. V. Kalinin, A. Y. Borisevich, E. W. Plummer, A. P. Baddorf

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

Pulsed laser deposition has enabled formation of highly oxidized and strained BaTi O3 films on SrTi O3 substrates in a layer-by-layer growth mode to thicknesses of 125 nm. Balancing thermodynamics and diffusion lengths enables controlled growth at the higher oxygen pressures required. Growth above 800 °C produces an array of uniform pseudo-two-dimensional islands on single-step terraces which are independent of film thickness and correlated with threading dislocations. Control over growth modes is enabled by the manipulation of diffusion lengths and produces films with morphologies with broad applicability for fabrication of high-quality oxide films and self-assembled nanostructures.

Original language	English
Article number	202901
Journal	Applied Physics Letters
Volume	91
Issue number	20
DOIs	https://doi.org/10.1063/1.2790477
State	Published - 2007

Funding

Research was sponsored by the Division of Materials Science and Engineering (J.S., S.V.K., and A.Y.B.) and the Center For Nanophase Materials Sciences Division (E.W.P. and A.P.B.), Oak Ridge National Laboratory, managed by UT-Battelle, LLC for the U.S. Department of Energy.

Funders	Funder number
Center For Nanophase Materials Sciences Division
U.S. Department of Energy
Oak Ridge National Laboratory
Division of Materials Sciences and Engineering
UT-Battelle

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AU - Baddorf, A. P.

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Layer-by-layer and pseudo-two-dimensional growth modes for heteroepitaxial BaTiO₃ films by exploiting kinetic limitations

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