Laser-generated plasmas in length scales relevant for thin film growth and processing: Simulation and experiment

S. B. Harris, J. H. Paiste, T. J. Holdsworth, R. R. Arslanbekov, R. P. Camata

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

In pulsed laser deposition, thin film growth is mediated by a laser-generated plasma, whose properties are critical for controlling the film microstructure. The advent of 2D materials has renewed the interest in how this ablation plasma can be used to manipulate the growth and processing of atomically thin systems. For such purpose, a quantitative understanding of the density, charge state, and kinetic energy of plasma constituents is needed at the location where they contribute to materials processes. Here, we study laser-induced plasmas over expansion distances of several centimeters from the ablation target, which is the relevant length scale for materials growth and modification. The study is enabled by a fast implementation of a laser ablation/plasma expansion model using an adaptive Cartesian mesh solver. Simulation outcomes for KrF excimer laser ablation of Cu are compared with Langmuir probe and optical emission spectroscopy measurements. Simulation predictions for the plasma-shielding threshold, the ionization state of species in the plasma, and the kinetic energy of ions, are in good correspondence with experimental data. For laser fluences of 1-4 J cm-2, the plume is dominated by Cu0, with small concentrations of Cu+ and electrons at the expansion front. Higher laser fluences (e.g. 7 J cm-2) lead to a Cu+ -rich plasma, with a fully ionized leading edge where Cu2+ is the dominant species. In both regimes, simulations indicate the presence of a low-density, high-temperature plasma expansion front with a high degree of ionization that may play a significant role in doping, annealing, and kinetically-driven phase transformations in 2D materials.

Original languageEnglish
Article number015203
JournalJournal of Physics D: Applied Physics
Volume53
Issue number1
DOIs
StatePublished - 2020
Externally publishedYes

Funding

S B Harris J H Paiste T J Holdsworth R R Arslanbekov R P Camata S B Harris J H Paiste T J Holdsworth R R Arslanbekov R P Camata Department of Physics, University of Alabama at Birmingham, Birmingham, AL 35294, United States of America CFD Research Corporation, Huntsville, AL 35806, United States of America Author to whom any correspondence should be addressed. S B Harris, J H Paiste, T J Holdsworth, R R Arslanbekov and R P Camata 2019-01-02 2019-10-15 11:14:03 cgi/release: Article released bin/incoming: New from .zip Alabama Space Grant Consortium https://doi.org/10.13039/100005729 NNX15AJ18H NSF EPSCoR RII-Track-1 Cooperative Agreement OIA-1655280 Small Business Innovative Research and Small Business Technology Transfer https://doi.org/10.13039/100007001 DE-SC0015746 yes In pulsed laser deposition, thin film growth is mediated by a laser-generated plasma, whose properties are critical for controlling the film microstructure. The advent of 2D materials has renewed the interest in how this ablation plasma can be used to manipulate the growth and processing of atomically thin systems. For such purpose, a quantitative understanding of the density, charge state, and kinetic energy of plasma constituents is needed at the location where they contribute to materials processes. Here, we study laser-induced plasmas over expansion distances of several centimeters from the ablation target, which is the relevant length scale for materials growth and modification. The study is enabled by a fast implementation of a laser ablation/plasma expansion model using an adaptive Cartesian mesh solver. Simulation outcomes for KrF excimer laser ablation of Cu are compared with Langmuir probe and optical emission spectroscopy measurements. Simulation predictions for the plasma-shielding threshold, the ionization state of species in the plasma, and the kinetic energy of ions, are in good correspondence with experimental data. For laser fluences of 1–4 J cm −2 , the plume is dominated by Cu 0 , with small concentrations of Cu + and electrons at the expansion front. Higher laser fluences (e.g. 7 J cm −2 ) lead to a Cu +  -rich plasma, with a fully ionized leading edge where Cu 2+ is the dominant species. In both regimes, simulations indicate the presence of a low-density, high-temperature plasma expansion front with a high degree of ionization that may play a significant role in doping, annealing, and kinetically-driven phase transformations in 2D materials. � 2019 IOP Publishing Ltd [1] Chang J and Chang J P 2017 J. Phys. D: Appl. Phys. 50 253001 10.1088/1361-6463/aa71c7 Chang J and Chang J P J. Phys. D: Appl. Phys. 0022-3727 50 25 253001 2017 [2] Allain J P and Shetty A 2017 J. Phys. D: Appl. Phys. 50 283002 10.1088/1361-6463/aa7506 Allain J P and Shetty A J. Phys. D: Appl. Phys. 0022-3727 50 28 283002 2017 [3] Oehrlein G S and Hamaguchi S 2018 Plasma Sources Sci. 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FundersFunder number
National Science Foundation1655280
Alabama Space Grant Consortiumhttps://doi.org/10.13039/100005729 NNX15AJ18H NSF EPSCoR
Kansas NSF EPSCoRDE-SC0015746

    Keywords

    • 2D materials
    • diagnostics
    • laser ablation
    • laser plasma simulation
    • plasma assisted processing
    • plasma processing of 2D materials
    • pulsed laser deposition

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