Laser Doppler vibrometry for piezoelectric coefficient (d33) measurements in irradiated aluminum nitride

Hongbin Sun; Eva Zarkadoula; Miguel L. Crespillo; William J. Weber; Vivek Rathod; Steven J. Zinkle; Pradeep Ramuhalli

doi:10.1016/j.sna.2022.113886

Laser Doppler vibrometry for piezoelectric coefficient (d₃₃) measurements in irradiated aluminum nitride

Hongbin Sun
, Eva Zarkadoula
, Miguel L. Crespillo
, William J. Weber
, Vivek Rathod
, Steven J. Zinkle
, Pradeep Ramuhalli

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Sensors used for experiments in advanced reactors must survive in harsh environments. Few material systems can be used to construct sensors viable for extreme conditions. Aluminum nitride (AlN) is one such material because it has high thermal stability and radiation resistance and sustains good piezoelectric and dielectric properties at high temperatures. In this work, the piezoelectric coefficient d₃₃ of the AlN single-crystal with thermal and irradiation damage was investigated using an indirect method with a laser Doppler vibrometer (LDV). Surface electrodes were deposited on the AlN samples, and the vibration response of the samples to an applied voltage was monitored using the LDV as a function of the excitation frequency. The d₃₃ estimation was based on the excitation voltage and the thickness-mode displacement extracted from the LDV measurements. Six AlN substrates were irradiated with 8 MeV Al^2＋ at three fluences (10¹⁵, 10¹⁶, and 10¹⁷ ions/cm²) and two temperatures (300 °C and 500 °C). The d₃₃ for the six irradiated samples and one pristine sample were measured, and the measurement uncertainty was estimated based on five repeated tests. All samples were also measured by a commercial piezometer for comparison. The experimental results demonstrate that the piezoelectric coefficients obtained by LDV were about 0.8–1.16 pm/V lower than those obtained by the piezometer. With the compensation of the clamping effect, the corrected LDV values are similar to the piezometer results. Both show similar trends in all samples, which validates the feasibility of the proposed method for d₃₃ measurement. Based on the LDV results, the irradiated samples show a 12%–22% decrease in d₃₃ compared with the pristine samples. The samples irradiated under the same fluence at a higher temperature (500 °C) demonstrated a lower d₃₃ than those at 300 °C. The effect of the retro-reflective tape, sample temperature, and sample size on the d₃₃ measurement were also studied.

Original language	English
Article number	113886
Journal	Sensors and Actuators A: Physical
Volume	347
DOIs	https://doi.org/10.1016/j.sna.2022.113886
State	Published - Nov 1 2022

Funding

Notice: This manuscript has been authored by UT-Battelle, LLC, under contract DE-AC05-00OR22725 with the US Department of Energy (DOE). The US government retains and the publisher, by accepting the article for publication, acknowledges that the US government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this manuscript, or allow others to do so, for US government purposes. DOE will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan (http://energy.gov/downloads/doe-public-access-plan).This work was supported by the Laboratory Directed Research and Development Program of Oak Ridge National Laboratory, United States of America, managed by UT-Battelle, LLC, for the US Department of Energy. Yury Osetskiy and Ben La Riviere from ORNL are acknowledged for the helpful comments on an earlier draft of the manuscript. The authors also would like to thank Christopher Nelson (ORNL) for cutting the AlN samples. Notice: This manuscript has been authored by UT-Battelle, LLC, under contract DE-AC05-00OR22725 with the US Department of Energy (DOE) . The US government retains and the publisher, by accepting the article for publication, acknowledges that the US government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this manuscript, or allow others to do so, for US government purposes. DOE will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan ( http://energy.gov/downloads/doe-public-access-plan ). This work was supported by the Laboratory Directed Research and Development Program of Oak Ridge National Laboratory, United States of America , managed by UT-Battelle, LLC, for the US Department of Energy . Yury Osetskiy and Ben La Riviere from ORNL are acknowledged for the helpful comments on an earlier draft of the manuscript. The authors also would like to thank Christopher Nelson (ORNL) for cutting the AlN samples.

Keywords

Aluminum nitride
Ion irradiation
Laser Doppler vibrometry
Piezoelectric coefficient

Access to Document

10.1016/j.sna.2022.113886

Cite this

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title = "Laser Doppler vibrometry for piezoelectric coefficient (d33) measurements in irradiated aluminum nitride",

abstract = "Sensors used for experiments in advanced reactors must survive in harsh environments. Few material systems can be used to construct sensors viable for extreme conditions. Aluminum nitride (AlN) is one such material because it has high thermal stability and radiation resistance and sustains good piezoelectric and dielectric properties at high temperatures. In this work, the piezoelectric coefficient d33 of the AlN single-crystal with thermal and irradiation damage was investigated using an indirect method with a laser Doppler vibrometer (LDV). Surface electrodes were deposited on the AlN samples, and the vibration response of the samples to an applied voltage was monitored using the LDV as a function of the excitation frequency. The d33 estimation was based on the excitation voltage and the thickness-mode displacement extracted from the LDV measurements. Six AlN substrates were irradiated with 8 MeV Al2＋ at three fluences (1015, 1016, and 1017 ions/cm2) and two temperatures (300 °C and 500 °C). The d33 for the six irradiated samples and one pristine sample were measured, and the measurement uncertainty was estimated based on five repeated tests. All samples were also measured by a commercial piezometer for comparison. The experimental results demonstrate that the piezoelectric coefficients obtained by LDV were about 0.8–1.16 pm/V lower than those obtained by the piezometer. With the compensation of the clamping effect, the corrected LDV values are similar to the piezometer results. Both show similar trends in all samples, which validates the feasibility of the proposed method for d33 measurement. Based on the LDV results, the irradiated samples show a 12\%–22\% decrease in d33 compared with the pristine samples. The samples irradiated under the same fluence at a higher temperature (500 °C) demonstrated a lower d33 than those at 300 °C. The effect of the retro-reflective tape, sample temperature, and sample size on the d33 measurement were also studied.",

keywords = "Aluminum nitride, Ion irradiation, Laser Doppler vibrometry, Piezoelectric coefficient",

author = "Hongbin Sun and Eva Zarkadoula and Crespillo, \{Miguel L.\} and Weber, \{William J.\} and Vivek Rathod and Zinkle, \{Steven J.\} and Pradeep Ramuhalli",

note = "Publisher Copyright: {\textcopyright} 2022 Elsevier B.V.",

year = "2022",

month = nov,

day = "1",

doi = "10.1016/j.sna.2022.113886",

language = "English",

volume = "347",

journal = "Sensors and Actuators A: Physical",

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TY - JOUR

T1 - Laser Doppler vibrometry for piezoelectric coefficient (d33) measurements in irradiated aluminum nitride

AU - Sun, Hongbin

AU - Zarkadoula, Eva

AU - Crespillo, Miguel L.

AU - Weber, William J.

AU - Rathod, Vivek

AU - Zinkle, Steven J.

AU - Ramuhalli, Pradeep

PY - 2022/11/1

Y1 - 2022/11/1

N2 - Sensors used for experiments in advanced reactors must survive in harsh environments. Few material systems can be used to construct sensors viable for extreme conditions. Aluminum nitride (AlN) is one such material because it has high thermal stability and radiation resistance and sustains good piezoelectric and dielectric properties at high temperatures. In this work, the piezoelectric coefficient d33 of the AlN single-crystal with thermal and irradiation damage was investigated using an indirect method with a laser Doppler vibrometer (LDV). Surface electrodes were deposited on the AlN samples, and the vibration response of the samples to an applied voltage was monitored using the LDV as a function of the excitation frequency. The d33 estimation was based on the excitation voltage and the thickness-mode displacement extracted from the LDV measurements. Six AlN substrates were irradiated with 8 MeV Al2＋ at three fluences (1015, 1016, and 1017 ions/cm2) and two temperatures (300 °C and 500 °C). The d33 for the six irradiated samples and one pristine sample were measured, and the measurement uncertainty was estimated based on five repeated tests. All samples were also measured by a commercial piezometer for comparison. The experimental results demonstrate that the piezoelectric coefficients obtained by LDV were about 0.8–1.16 pm/V lower than those obtained by the piezometer. With the compensation of the clamping effect, the corrected LDV values are similar to the piezometer results. Both show similar trends in all samples, which validates the feasibility of the proposed method for d33 measurement. Based on the LDV results, the irradiated samples show a 12%–22% decrease in d33 compared with the pristine samples. The samples irradiated under the same fluence at a higher temperature (500 °C) demonstrated a lower d33 than those at 300 °C. The effect of the retro-reflective tape, sample temperature, and sample size on the d33 measurement were also studied.

AB - Sensors used for experiments in advanced reactors must survive in harsh environments. Few material systems can be used to construct sensors viable for extreme conditions. Aluminum nitride (AlN) is one such material because it has high thermal stability and radiation resistance and sustains good piezoelectric and dielectric properties at high temperatures. In this work, the piezoelectric coefficient d33 of the AlN single-crystal with thermal and irradiation damage was investigated using an indirect method with a laser Doppler vibrometer (LDV). Surface electrodes were deposited on the AlN samples, and the vibration response of the samples to an applied voltage was monitored using the LDV as a function of the excitation frequency. The d33 estimation was based on the excitation voltage and the thickness-mode displacement extracted from the LDV measurements. Six AlN substrates were irradiated with 8 MeV Al2＋ at three fluences (1015, 1016, and 1017 ions/cm2) and two temperatures (300 °C and 500 °C). The d33 for the six irradiated samples and one pristine sample were measured, and the measurement uncertainty was estimated based on five repeated tests. All samples were also measured by a commercial piezometer for comparison. The experimental results demonstrate that the piezoelectric coefficients obtained by LDV were about 0.8–1.16 pm/V lower than those obtained by the piezometer. With the compensation of the clamping effect, the corrected LDV values are similar to the piezometer results. Both show similar trends in all samples, which validates the feasibility of the proposed method for d33 measurement. Based on the LDV results, the irradiated samples show a 12%–22% decrease in d33 compared with the pristine samples. The samples irradiated under the same fluence at a higher temperature (500 °C) demonstrated a lower d33 than those at 300 °C. The effect of the retro-reflective tape, sample temperature, and sample size on the d33 measurement were also studied.

KW - Aluminum nitride

KW - Ion irradiation

KW - Laser Doppler vibrometry

KW - Piezoelectric coefficient

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DO - 10.1016/j.sna.2022.113886

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