Laser-Crystallized High Quality ITO on Plastic Substrates for Flexible Displays

Wonsuk Chung; Paul Wickboldt; Daniel Toet; Paul G. Carey; Michael O. Thompson

doi:10.1557/proc-769-h10.1

Laser-Crystallized High Quality ITO on Plastic Substrates for Flexible Displays

Wonsuk Chung, Paul Wickboldt, Daniel Toet, Paul G. Carey, Michael O. Thompson

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

In the study presented here, we successfully demonstrated that high quality ITO films could be obtained on plastic substrates using Excimer laser crystallization. ITO films were first deposited at 10°C on PEN substrates by DC magnetron sputtering, and then irradiated using a homogenized pulsed XeCl excimer laser beam (308 nm, 35 ns pulse duration) in a vacuum chamber. It was possible to reliably attain Type I ITO films with sheet resistances down to 35 Ω/□, combined with 80% optical transmittance in visible range. Well defined 2 μm lines could be obtained using simple HCl etchant at room temperature. We also developed Type II ITO films with a sheet resistance of 15 Ω/□ and an optical transmittance of 80% by means of laser annealing on plastic substrates, although these materials were found inferior to Type I in etching properties.

Original language	English
Pages (from-to)	319-324
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	769
DOIs	https://doi.org/10.1557/proc-769-h10.1
State	Published - 2003
Externally published	Yes
Event	Flexible Electronics - Materials and Device Technology - San Francisco, CA, United States Duration: Apr 22 2003 → Apr 25 2003

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title = "Laser-Crystallized High Quality ITO on Plastic Substrates for Flexible Displays",

abstract = "In the study presented here, we successfully demonstrated that high quality ITO films could be obtained on plastic substrates using Excimer laser crystallization. ITO films were first deposited at 10°C on PEN substrates by DC magnetron sputtering, and then irradiated using a homogenized pulsed XeCl excimer laser beam (308 nm, 35 ns pulse duration) in a vacuum chamber. It was possible to reliably attain Type I ITO films with sheet resistances down to 35 Ω/□, combined with 80\% optical transmittance in visible range. Well defined 2 μm lines could be obtained using simple HCl etchant at room temperature. We also developed Type II ITO films with a sheet resistance of 15 Ω/□ and an optical transmittance of 80\% by means of laser annealing on plastic substrates, although these materials were found inferior to Type I in etching properties.",

author = "Wonsuk Chung and Paul Wickboldt and Daniel Toet and Carey, \{Paul G.\} and Thompson, \{Michael O.\}",

year = "2003",

doi = "10.1557/proc-769-h10.1",

language = "English",

volume = "769",

pages = "319--324",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

note = "Flexible Electronics - Materials and Device Technology ; Conference date: 22-04-2003 Through 25-04-2003",

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TY - JOUR

T1 - Laser-Crystallized High Quality ITO on Plastic Substrates for Flexible Displays

AU - Chung, Wonsuk

AU - Wickboldt, Paul

AU - Toet, Daniel

AU - Carey, Paul G.

AU - Thompson, Michael O.

PY - 2003

Y1 - 2003

N2 - In the study presented here, we successfully demonstrated that high quality ITO films could be obtained on plastic substrates using Excimer laser crystallization. ITO films were first deposited at 10°C on PEN substrates by DC magnetron sputtering, and then irradiated using a homogenized pulsed XeCl excimer laser beam (308 nm, 35 ns pulse duration) in a vacuum chamber. It was possible to reliably attain Type I ITO films with sheet resistances down to 35 Ω/□, combined with 80% optical transmittance in visible range. Well defined 2 μm lines could be obtained using simple HCl etchant at room temperature. We also developed Type II ITO films with a sheet resistance of 15 Ω/□ and an optical transmittance of 80% by means of laser annealing on plastic substrates, although these materials were found inferior to Type I in etching properties.

AB - In the study presented here, we successfully demonstrated that high quality ITO films could be obtained on plastic substrates using Excimer laser crystallization. ITO films were first deposited at 10°C on PEN substrates by DC magnetron sputtering, and then irradiated using a homogenized pulsed XeCl excimer laser beam (308 nm, 35 ns pulse duration) in a vacuum chamber. It was possible to reliably attain Type I ITO films with sheet resistances down to 35 Ω/□, combined with 80% optical transmittance in visible range. Well defined 2 μm lines could be obtained using simple HCl etchant at room temperature. We also developed Type II ITO films with a sheet resistance of 15 Ω/□ and an optical transmittance of 80% by means of laser annealing on plastic substrates, although these materials were found inferior to Type I in etching properties.

UR - https://www.scopus.com/pages/publications/1542364391

U2 - 10.1557/proc-769-h10.1

DO - 10.1557/proc-769-h10.1

M3 - Conference article

AN - SCOPUS:1542364391

SN - 0272-9172

VL - 769

SP - 319

EP - 324

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Flexible Electronics - Materials and Device Technology

Y2 - 22 April 2003 through 25 April 2003

ER -

Laser-Crystallized High Quality ITO on Plastic Substrates for Flexible Displays

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