Knudsen forces on microcantilevers

A. Passian, A. Wig, F. Meriaudeau, T. L. Ferrell, T. Thundat

Research output: Contribution to journalArticlepeer-review

66 Scopus citations

Abstract

When two surfaces at two different temperatures are separated by a distance comparable to a mean-free path of the molecules of the ambient medium, the surfaces experience Knudsen force. This mechanical force can be important in microelectromechanical systems and in atomic force microscopy. A theoretical discussion of the magnitude of the forces and the conditions where they can be encountered is discussed. A potential application of the Knudsen force in designing a cantilever-based vacuum gauge is discussed.

Original languageEnglish
Pages (from-to)6326-6333
Number of pages8
JournalJournal of Applied Physics
Volume92
Issue number10
DOIs
StatePublished - Nov 15 2002

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