Abstract
When two surfaces at two different temperatures are separated by a distance comparable to a mean-free path of the molecules of the ambient medium, the surfaces experience Knudsen force. This mechanical force can be important in microelectromechanical systems and in atomic force microscopy. A theoretical discussion of the magnitude of the forces and the conditions where they can be encountered is discussed. A potential application of the Knudsen force in designing a cantilever-based vacuum gauge is discussed.
Original language | English |
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Pages (from-to) | 6326-6333 |
Number of pages | 8 |
Journal | Journal of Applied Physics |
Volume | 92 |
Issue number | 10 |
DOIs | |
State | Published - Nov 15 2002 |