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Kinetics of borosilicate glass deposition
Joseph J. Biernacki
, Pravin Kannan
,
Harry Meyer
,
Criag Blue
Research output
:
Contribution to journal
›
Article
›
peer-review
1
Scopus citations
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Material Science
Activation Energy
33%
Boron Nitride
33%
Borosilicate Glass
100%
Film
100%
Film Deposition
33%
Film Growth
33%
Phase Composition
33%
Silicon
33%
Water Vapor
33%