Abstract
Uncooled bimaterial microcantilever detectors were fabricated and used to obtain infrared (IR) images of objects at temperatures ranging from room temperature to a few hundred °C. Images were obtained using both single 50μm×50μm microcantilever IR detectors and arrays of microcantilever detectors. Thermal radiation from the target object was imaged onto the detector and the resulting temperature change caused microcantilever bending due to the bimaterial effect. This micromechanical bending was measured using two different non-contact optical readout techniques and IR images were obtained. A smaller size (20μm×20μm) microcantilever IR detector was also used to capture IR images of near room temperature objects.
Original language | English |
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Pages (from-to) | 451-458 |
Number of pages | 8 |
Journal | Ultramicroscopy |
Volume | 97 |
Issue number | 1-4 |
DOIs | |
State | Published - 2003 |
Funding
We like to acknowledge support from the Defense Advanced Research Projects Agency, the National Science Foundation and the US Department of Energy. This work was partially supported by the Laboratory Director's Research and Development Program of Oak Ridge National Laboratory. Oak Ridge National Laboratory is operated for the US Department of Energy by UT-Battelle under contract DE-AC05-96OR22464.
Keywords
- IR detectors
- IR imaging
- IR sensors
- Microcantilever