Ion beam and laser-assisted micromachining of single-crystal diamond

John D. Hunn; C. Paul Christensen

Ion beam and laser-assisted micromachining of single-crystal diamond

John D. Hunn
, C. Paul Christensen

Particle Fuel Forms

Research output: Contribution to specialist publication › Article

30 Scopus citations

Abstract

A technique for producing free-standing, single-crystal diamond microstructures from homoepitaxial films has been demonstrated. This simple preparation method for miniature parts makes diamond a reasonable alternative to the more common silicon-based micromechanical devices that have been produced over the past few years.

Original language	English
Pages	57-60
Number of pages	4
Volume	37
No	12
Specialist publication	Solid State Technology
State	Published - Dec 1994

Cite this

@misc{74e35c6cc18d42a1b4c565b8517b0687,

title = "Ion beam and laser-assisted micromachining of single-crystal diamond",

abstract = "A technique for producing free-standing, single-crystal diamond microstructures from homoepitaxial films has been demonstrated. This simple preparation method for miniature parts makes diamond a reasonable alternative to the more common silicon-based micromechanical devices that have been produced over the past few years.",

author = "Hunn, \{John D.\} and Christensen, \{C. Paul\}",

year = "1994",

month = dec,

language = "English",

volume = "37",

pages = "57--60",

journal = "Solid State Technology",

issn = "0038-111X",

}

TY - GEN

T1 - Ion beam and laser-assisted micromachining of single-crystal diamond

AU - Hunn, John D.

AU - Christensen, C. Paul

PY - 1994/12

Y1 - 1994/12

N2 - A technique for producing free-standing, single-crystal diamond microstructures from homoepitaxial films has been demonstrated. This simple preparation method for miniature parts makes diamond a reasonable alternative to the more common silicon-based micromechanical devices that have been produced over the past few years.

AB - A technique for producing free-standing, single-crystal diamond microstructures from homoepitaxial films has been demonstrated. This simple preparation method for miniature parts makes diamond a reasonable alternative to the more common silicon-based micromechanical devices that have been produced over the past few years.

UR - https://www.scopus.com/pages/publications/0028757678

M3 - Article

AN - SCOPUS:0028757678

SN - 0038-111X

VL - 37

SP - 57

EP - 60

JO - Solid State Technology

JF - Solid State Technology

ER -

Ion beam and laser-assisted micromachining of single-crystal diamond

Abstract

Other files and links

Fingerprint

Cite this